Pressure sensor with integrated structure
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United States of America Patent
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-
Jul 22, 2008
Grant Date -
Jun 29, 2006
app pub date -
Jun 9, 2004
filing date -
Jun 13, 2003
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Pressure sensor with an integrated structure comprising a support (33, 133, 233) and a silicon die (11), which lies substantially on the same plane as the upper surface (37, 137, 237) of the support and is integrated in a seat (34, 134, 234) made in the thickness of the support. On the inside face (23) of the die (11), in contact with the fluid the pressure of which has to be measured, is a protective layer.
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