Optical microelectromechanical device
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United States of America Patent
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Jul 22, 2008
Grant Date -
Jul 6, 2006
app pub date -
May 19, 2005
filing date -
Dec 30, 2004
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An optical microelectromechanical systems (MEMS) device includes a transparent substrate with a plurality of discrete conductive lines, an dielectric layer disposed on the substrate and the conductive lines, reflective members and edge supporters. The reflective members and conductive lines are orthogonal, defining a plurality of pixel areas. Each reflective member is supported by edge supporters arranged around each pixel area and over the dielectric layer by a predetermined gap. The reflective members cover the connecting end of each edge supporter, providing protection from damage during fabrication.
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