Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
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United States of America Patent
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Jul 22, 2008
Grant Date -
Jun 22, 2006
app pub date -
Jan 25, 2006
filing date -
Jun 19, 1995
priority date (Note) -
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Abstract
A spatial light modulator has an array of reflective surfaces of deflectable mirror plates. For improving the reflectivity of the mirror plates, layers that are preferably transmissive to visible light are provided on the reflective surfaces of the mirror plates. The layers may have different thicknesses and/or refractive indices to the visible light to optimize the reflectivity of the mirror plates.
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