Turbomolecular pump with static charge control
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United States of America Patent
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-
Jul 29, 2008
Grant Date -
Feb 22, 2007
app pub date -
Aug 16, 2005
filing date -
Aug 16, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention relates to turbomolecular vacuum pumps and an arrangement for reducing or eliminating an accumulated static charge in the rotor caused by an interaction of the rotor with either electrically charged or neutral particles in the pumped media. Electrical charge exchange between the rotor and the electrically grounded stator is effected through a wire or other means of electrical contact, or through charge emission devices such as a field emission tip. In either case, electrostatic charges in the rotor are reduced or eliminated.
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