Method of forming optical images, apparatus for carrying out said method and process for manufacturing a device using said method
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United States of America Patent
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Jul 29, 2008
Grant Date -
Nov 16, 2006
app pub date -
Aug 10, 2004
filing date -
Aug 27, 2003
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An optical image is formed in a resist layer (5) by a number of subilluminations, in each of which an array of light valves (21 25) and a corresponding array (40) of light converging elements are used to form a pattern of spots in the resist layer according to a sub image Between the sub illuminations, the resist layer (5) is displaced relative to the arrays (21 25, 40) The scale of the optical image in the resist layer (5) is measured and this scale is compared with the scale of the image required to be written If there is a difference, the spacing between the light converging elements (43) is physically altered to adjust the substrate scale.
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