Temperature-compensated film bulk acoustic resonator (FBAR) devices

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United States of America Patent

PATENT NO 7408428
APP PUB NO 20050110598A1
SERIAL NO

10977398

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Abstract

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The temperature-compensated film bulk acoustic resonator (FBAR) device comprises an FBAR stack. The FBAR stack comprises an FBAR and a temperature-compensating element. The FBAR is characterized by a resonant frequency having a temperature coefficient, and comprises opposed planar electrodes and a piezoelectric element between the electrodes. The piezoelectric element has a temperature coefficient on which the temperature coefficient of the resonant frequency depends at least in part. The temperature-compensating element has a temperature coefficient opposite in sign to the temperature coefficient of the piezoelectric element.

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Patent Owner(s)

Patent OwnerAddress
AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE LIMITEDSINGAPORE 768923

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Larson, III John D Palo Alto, CA 53 3180

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