Methods and apparatus for repositioning support for a substrate carrier
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United States of America Patent
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-
Aug 5, 2008
Grant Date -
Jan 19, 2006
app pub date -
Jul 12, 2005
filing date -
Jul 14, 2004
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
In a first aspect, a first method is provided repositioning support provided by an end effector. The first method includes the steps of (1) employing the end effector to support a substrate carrier by a bottom of the substrate carrier; (2) transferring the substrate carrier from the end effector to an intermediate support location, wherein the intermediate support location supports the substrate carrier by a bottom of the substrate carrier; (3) repositioning the end effector proximate an overhead transfer flange of the substrate carrier; (4) employing the end effector to support the substrate carrier by the overhead transfer flange of the substrate carrier; and (5) transferring the substrate carrier from the intermediate support location. Numerous other aspects are provided.
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