Multilayer getter structures and methods for making same

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United States of America Patent

PATENT NO 7413814
APP PUB NO 20040253476A1
SERIAL NO

10866345

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Abstract

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Getter multilayer structures are disclosed, embodiments of which include at least a layer of a non-evaporable getter alloy having a low activation temperature over a layer of a different non-evaporable getter material having high specific surface area, both preferably obtained by cathodic deposition. The multilayer NEG structures exhibit better gas sorbing characteristics and lower activation temperature lower than those of deposits made up of a single material. A process for manufacturing such structures includes depositing a first, high surface area NEG film on a support, and then depositing a thin over layer of low activation NEG film.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
SAES GETTERS S.P.A.MILAN140
SAES GETTES, S.P.A.2002 LAINATE (MILAN), IT1

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Conte, Andrea Milan, IT 40 220
Moraja, Marco Milan, IT 12 54

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