Multilayer getter structures and methods for making same
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United States of America Patent
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Aug 19, 2008
Grant Date -
Dec 16, 2004
app pub date -
Jun 10, 2004
filing date -
Jun 11, 2003
priority date (Note) -
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status (Latency Note)
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Abstract
Getter multilayer structures are disclosed, embodiments of which include at least a layer of a non-evaporable getter alloy having a low activation temperature over a layer of a different non-evaporable getter material having high specific surface area, both preferably obtained by cathodic deposition. The multilayer NEG structures exhibit better gas sorbing characteristics and lower activation temperature lower than those of deposits made up of a single material. A process for manufacturing such structures includes depositing a first, high surface area NEG film on a support, and then depositing a thin over layer of low activation NEG film.
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