Slit coater
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United States of America Patent
Stats
-
Aug 26, 2008
Grant Date -
Jul 6, 2006
app pub date -
Aug 19, 2005
filing date -
Dec 31, 2004
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A slit coater including buffer members having elasticity and installed at both sides of a slit nozzle unit, compensating for a height difference between both sides, preventing breakdown due to excessive stress generated by the height, and reducing set-up time. The slit coater includes: a table on which an object to be processed is mounted; a slit nozzle unit formed above the table for applying coating solution onto the object; a driving unit moving the slit nozzle unit in a predetermined direction; and buffer members having elasticity installed at both sides of the slit nozzle unit.
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