Method and apparatus for measuring dimensional changes in transparent substrates
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United States of America Patent
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Aug 26, 2008
Grant Date -
Nov 2, 2006
app pub date -
Apr 28, 2005
filing date -
Apr 28, 2005
priority date (Note) -
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Abstract
A method of measuring dimensional changes in a transparent substrate includes forming an array of reference markers on a reference plate, forming an array of substrate markers on the transparent substrate, stacking the reference plate and transparent substrate such that the reference markers and substrate markers overlap, measuring coordinates of the substrate markers relative to coordinates of the reference markers before and after processing the transparent substrate, and determining dimensional changes in the transparent substrate from the difference between the measured relative coordinates of the substrate markers before and after processing the transparent substrate.
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