Durable graphite connector and method for manufacturing thereof
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United States of America Patent
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Sep 2, 2008
Grant Date -
Dec 13, 2007
app pub date -
Oct 12, 2006
filing date -
Jun 11, 2006
priority date (Note) -
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Abstract
An article comprising a graphite part coated with a pyrolytic graphite (pG) for increased mechanical strength of at least 25% over an uncoated graphite part. In connector applications for use in a semiconductor processing assembly such as a heater, the pG coated component is overcoated with at least a protective layer of an electrically insulating material, and wherein part of the pG coated graphite part is exposed (uncoated with the protective layer) for providing electrical connections to the assembly.
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