US Patent No: 7,420,728

Number of patents in Portfolio can not be more than 2000

Methods of fabricating interferometric modulators by selectively removing a material

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ALSO PUBLISHED AS: 20060076311
ATTORNEY / AGENT: (SPONSORED)
 

Importance

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Abstract

Methods for making MEMS devices such as interferometric modulators involve selectively removing a sacrificial portion of a material to form an internal cavity, leaving behind a remaining portion of the material to form a post structure. The material may be blanket deposited and selectively altered to define sacrificial portions that are selectively removable relative to the remaining portions. Alternatively, a material layer can be laterally recessed away from openings in a covering layer. These methods may be used to make unreleased and released interferometric modulators.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA594

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arbuckle, Brian W Danville, CA 21 257
Floyd, Philip D Redwood City, CA 90 2068
Tung, Ming-Hau San Francisco, CA 113 1559

Cited Art

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6,736,987 Silicon etching apparatus using XeF2 46 2000
 
TELEDYNE DALSA SEMICONDUCTOR INC. (1)
6,602,791 Manufacture of integrated fluidic devices 65 2001
 
THE REGENTS OF THE UNIVERSITY OF COLORADO (1)
5,381,253 Chiral smectic liquid crystal optical modulators having variable retardation 225 1991
 
The United States of America as represented by the Secretary of the Navy (1)
4,228,437 Wideband polarization-transforming electromagnetic mirror 165 1979
 
TOPPOLY OPTOELECTRONICS CORP. (1)
5,976,902 Method of fabricating a fully self-aligned TFT-LCD 76 1998
 
Other [Check patent profile for assignment information] (10)
4,445,050 Device for conversion of light power to electric power 178 1981
4,663,083 Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics 170 1984
5,142,414 Electrically actuatable temporal tristimulus-color device 255 1991
5,228,013 Clock-painting device and method for indicating the time-of-day with a non-traditional, now analog artistic panel of digital electronic visual displays 132 1992
5,526,327 Spatial displacement time display 133 1994
5,500,635 Products incorporating piezoelectric material 264 1994
5,641,391 Three dimensional microfabrication by localized electrodeposition and etching 137 1995
6,819,469 High-resolution spatial light modulator for 3-dimensional holographic display 229 2003
2007/0064,760 Optical amplification in miniaturized polymer cavity resonators 17 2004
2005/0001,828 Charge control of micro-electromechanical device 170 2004

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (13)
7,864,403 Post-release adjustment of interferometric modulator reflectivity 0 2009
7,875,485 Methods of fabricating MEMS devices having overlying support structures 2 2009
7,835,093 Methods for forming layers within a MEMS device using liftoff processes 5 2010
8,218,229 Support structure for MEMS device and methods therefor 0 2010
8,149,497 Support structure for MEMS device and methods therefor 1 2010
7,952,789 MEMS devices with multi-component sacrificial layers 4 2010
8,284,475 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2010
8,298,847 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 0 2010
8,164,815 MEMS cavity-coating layers and methods 0 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,358,458 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 0 2010
8,090,229 Method and device for providing electronic circuitry on a backplate 1 2011
8,218,919 Method and device for providing electronic circuitry on a backplate 0 2012
 
UNITED MICROELECTRONICS CORP. (2)
7,795,056 Semiconductor device and method of fabricating the same 0 2008
8,101,987 Semiconductor device and method of fabricating the same 1 2010

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