Stacked process modules for a semiconductor handling system
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United States of America Patent
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Sep 9, 2008
Grant Date -
Jun 2, 2005
app pub date -
Nov 10, 2004
filing date -
Nov 10, 2003
priority date (Note) -
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Abstract
Methods and systems are provided for a vacuum-based semiconductor handling system. The system may be a linear system with a four-link robotic SCARA arm for moving materials in the system. The system may include one or more vertically stacked load locks or vertically stacked process modules.
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