Device and method for stacked multi-level uncoupled electrostatic actuators

United States of America Patent

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Sep 9, 2008
Grant Date
Dec 14, 2006
app pub date
Feb 15, 2004
filing date
Feb 20, 2003

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Expired

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Abstract

A multi-level decoupled micro-actuator device comprising a first level substrate (410), a second level frame (420) stacked on said first level substrate (410), a third level frame (430) stacked on said second level frame (420).

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Patent Owner	Address
TECHNION RESEARCH & DEVELOPMENT FOUNDATION LTD	HAIFA HAIFA HAIFA DISTRICT

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G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

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Inventor Name	Address	# of filed Patents	Total Citations
Bochobza-Degani, Ofir	Ashkelon, IL	2	7
Elata, David	Haifa, IL	10	77
Nemirovsky, Yael	Haifa, IL	35	429

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Device and method for stacked multi-level uncoupled electrostatic actuators

Number of patents in Portfolio can not be more than 2000

United States of America Patent

10545949

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PATENT NO	7423794
APP PUB NO	20060279862A1
SERIAL NO	10545949
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
September 09, 2008	US,7423794,B2 US7423794B2	GRANTED PATENT AS SECOND PUBLICATION
December 14, 2006	US,20060279862,A1 US20060279862A1	FIRST PUBLISHED PATENT APPLICATION

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10545949

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