Addressing circuit and method for bi-directional micro-mirror array
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United States of America Patent
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Sep 9, 2008
Grant Date -
Feb 22, 2007
app pub date -
Aug 16, 2006
filing date -
Aug 16, 2005
priority date (Note) -
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Abstract
A control substrate of spatial light modulator for a bi-directional micro mirror array includes a plurality of unit cells, each includes a common electrode at a fixed constant potential and an addressing electrode under the mirror plate on opposite sides of a pivot point of the mirror hinge, a pair of micro landing tips, a single CMOS transistor electrically connected to a storage capacitor, and a word-line/bit-line interconnection structure for communicating signals.
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