Method for etching microchannel networks within liquid crystal polymer substrates
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United States of America Patent
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Sep 16, 2008
Grant Date -
Sep 28, 2006
app pub date -
Jun 30, 2005
filing date -
Jun 30, 2004
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Abstract
The present invention provides for a method for the fabrication of microchannels, and more particularly to the fabrication of microchannels for use in Microelectromechanical (MEMS) devices and MEMS related devices. In accordance with an embodiment of the present invention, microchannels are formed by a microfabrication method utilizing electronic imaging techniques in combination with chemical etching and subsequent metallization. The method of the present invention is effective in producing networks of channels in liquid crystal polymer (LCP) polymeric substrates which are highly defined in terms of their patterns, and thus are able to encompass a wide variety of end uses.
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