Methods for determining organic component concentrations in an electrolytic solution
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United States of America Patent
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Sep 23, 2008
Grant Date -
May 18, 2006
app pub date -
Dec 23, 2005
filing date -
Apr 27, 2004
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Abstract
The present invention relates to a method and apparatus for determining organic additive concentrations in a sample electrolytic solution, preferably a copper electroplating solution, by measuring the double layer capacitance of a measuring electrode in such sample solution. Specifically, the present invention utilizes the correlation between double layer capacitance and the organic additive concentration for concentration mapping, based on the double layer capacitance measured for the sample electrolytic solution.
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