Electrochemical drive circuitry and method
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United States of America Patent
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Sep 23, 2008
Grant Date -
Nov 10, 2005
app pub date -
May 4, 2004
filing date -
May 4, 2004
priority date (Note) -
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Abstract
An electrochemical drive circuitry and method, such as may be employed in electroplating bath chemical monitoring. A microcontroller can be utilized to selectively apply galvanostatic or potentiostatic conditions on the electrochemical cell, for measurement of response of the electrochemical cell to such conditions, with the microcontroller arranged to generate an offset potential to control potential across the electrochemical cell within a range of potential accommodated by a unipolar power supply, and/or a CMOS analog switch can be employed in combination with individual digital-to-analog converters for each of the current-controlled and potential-controlled conditions, to provide high-speed, dual mode operating capability.
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