Active wafer probe
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United States of America Patent
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Sep 23, 2008
Issued Date -
N/A
app pub date -
Dec 21, 2004
filing date -
Dec 24, 2003
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A probe suitable for probing a semiconductor wafer that includes an active circuit. The probe may have a rigid probing member and include a flexible interconnection between the active circuit and a support structure. The active circuit may have a relatively low capacitance as seen by the device under test.
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