US Patent No: 7,427,868

Number of patents in Portfolio can not be more than 2000

Active wafer probe

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ALSO PUBLISHED AS: 20050140386
ATTORNEY / AGENT: (SPONSORED)
 

Importance

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Abstract

A probe suitable for probing a semiconductor wafer that includes an active circuit. The probe may have a rigid probing member and include a flexible interconnection between the active circuit and a support structure. The active circuit may have a relatively low capacitance as seen by the device under test.

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First Claim

Related Publications

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Patent Owner(s)

Patent OwnerAddressTotal Patents
CASCADE MICROTECH, INC.BEAVERTON, OR254

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gleason, K Reed Portland, OR 58 963
Strid, Eric Portland, OR 14 14

Cited Art

Patent Info (Count) # Cites Year
 
FORMFACTOR, INC. (153)
5,476,211 Method of manufacturing electrical contacts, using a sacrificial member 353 1993
5,917,707 Flexible contact structure with an electrically conductive shell 288 1994
6,049,976 Method of mounting free-standing resilient electrical contact structures to electronic components 119 1995
5,772,451 Sockets for electronic components and methods of connecting to electronic components 342 1995
5,974,662 Method of planarizing tips of probe elements of a probe card assembly 340 1995
5,829,128 Method of mounting resilient contact structures to semiconductor devices 213 1995
5,852,871 Method of making raised contacts on electronic components 127 1995
5,601,740 Method and apparatus for wirebonding, for severing bond wires, and for forming balls on the ends of bond wires 111 1995
5,820,014 Solder preforms 113 1996
5,773,780 Method of severing bond wires and forming balls at their ends 75 1996
5,900,738 Contact structure device for interconnections, interposer, semiconductor assembly and package using the same and method 145 1996
5,926,951 Method of stacking electronic components 154 1996
6,184,587 Resilient contact structures, electronic interconnection component, and method of mounting resilient contact structures to electronic components 111 1996
6,242,803 Semiconductor devices with integral contact structures 87 1996
6,274,823 Interconnection substrates with resilient contact structures on both sides 110 1996
6,476,333 Raised contact structures (solder columns) 70 1996
6,064,213 Wafer-level burn-in and test 251 1997
5,806,181 Contact carriers (tiles) for populating larger substrates with spring contacts 253 1997
5,994,152 Fabricating interconnects and tips using sacrificial substrates 172 1997
6,442,831 Method for shaping spring elements 72 1997
6,482,013 Microelectronic spring contact element and electronic component having a plurality of spring contact elements 137 1997
5,832,601 Method of making temporary connections between electronic components 187 1997
5,864,946 Method of making contact tip structures 157 1997
5,878,486 Method of burning-in semiconductor devices 107 1997
5,884,398 Mounting spring elements on semiconductor devices 103 1997
5,983,493 Method of temporarily, then permanently, connecting to a semiconductor device 117 1997
5,998,228 Method of testing semiconductor 126 1997
6,032,356 Wafer-level test and burn-in, and semiconductor process 158 1997
6,184,053 Method of making microelectronic spring contact elements 192 1997
5,912,046 Method and apparatus for applying a layer of flowable coating material to a surface of an electronic component 76 1997
5,998,864 Stacking semiconductor devices, particularly memory chips 176 1997
6,050,829 Making discrete power connections to a space transformer of a probe card assembly 154 1997
6,307,161 Partially-overcoated elongate contact structures 69 1997
6,043,563 Electronic components with terminals and spring contact elements extending from areas which are remote from the terminals 157 1997
6,741,085 Contact carriers (tiles) for populating larger substrates with spring contacts 88 1997
6,520,778 Microelectronic contact structures, and methods of making same 144 1998
6,720,501 PC board having clustered blind vias 68 1998
6,042,712 Apparatus for controlling plating over a face of a substrate 110 1998
6,090,261 Method and apparatus for controlling plating over a face of a substrate 81 1998
6,110,823 Method of modifying the thickness of a plating on a member by creating a temperature gradient on the member, applications for employing such a method, and structures resulting from such a method 172 1998
6,023,103 Chip-scale carrier for semiconductor devices including mounted spring contacts 148 1998
6,033,935 Sockets for "springed" semiconductor devices 108 1998
6,669,489 Interposer, socket and assembly for socketing an electronic component and method of making and using same 106 1998
6,330,164 Interconnect assemblies and methods including ancillary electronic component connected in immediate proximity of semiconductor device 120 1998
6,029,344 Composite interconnection element for microelectronic components, and method of making same 202 1998
6,246,247 Probe card assembly and kit, and methods of using same 112 1998
6,441,315 Contact structures with blades having a wiping motion 104 1998
6,690,185 Large contactor with multiple, aligned contactor units 113 1998
6,255,126 Lithographic contact elements 173 1998
6,268,015 Method of making and using lithographic contact springs 115 1998
6,150,186 Method of making a product with improved material properties by moderate heat-treatment of a metal incorporating a dilute additive 94 1998
6,429,029 Concurrent design and subsequent partitioning of product and test die 126 1998
6,456,099 Special contact points for accessing internal circuitry of an integrated circuit 102 1998
6,215,670 Method for manufacturing raised electrical contact pattern of controlled geometry 85 1999
6,208,225 Filter structures for integrated circuit interfaces 135 1999
6,218,910 High bandwidth passive integrated circuit tester probe card assembly 131 1999
6,448,865 Integrated circuit interconnect system 72 1999
6,452,411 Efficient parallel testing of integrated circuit devices using a known good device to generate expected responses 101 1999
6,480,978 Parallel testing of integrated circuit devices using cross-DUT and within-DUT comparisons 79 1999
6,499,121 Distributed interface for parallel testing of multiple devices using a single tester channel 92 1999
6,627,483 Method for mounting an electronic component 80 1999
6,644,982 Method and apparatus for the transport and tracking of an electronic component 100 1999
6,887,723 Method for processing an integrated circuit including placing dice into a carrier and testing 72 1999
6,468,098 Electrical contactor especially wafer level contactor using fluid pressure 90 1999
6,655,023 Method and apparatus for burning-in semiconductor devices in wafer form 81 1999
6,827,584 Interconnect for microelectronic structures with enhanced spring characteristics 90 1999
6,491,968 Methods for making spring interconnect structures 95 1999
6,672,875 Spring interconnect structures 96 1999
6,339,338 Apparatus for reducing power supply noise in an integrated circuit 88 2000
6,168,974 Process of mounting spring contacts to semiconductor devices 104 2000
6,459,343 Integrated circuit interconnect system forming a multi-pole filter 68 2000
6,232,149 Sockets for "springed" semiconductor devices 77 2000
6,509,751 Planarizer for a semiconductor contactor 122 2000
6,215,196 Electronic component with terminals and spring contact elements extending from areas which are remote from the terminals 70 2000
6,640,432 Method of fabricating shaped springs 100 2000
6,677,744 System for measuring signal path resistance for an integrated circuit tester interconnect structure 69 2000
6,476,630 Method for testing signal paths between an integrated circuit wafer and a wafer tester 73 2000
6,525,555 Wafer-level burn-in and test 96 2000
6,727,579 ELECTRICAL CONTACT STRUCTURES FORMED BY CONFIGURING A FLEXIBLE WIRE TO HAVE A SPRINGABLE SHAPE AND OVERCOATING THE WIRE WITH AT LEAST ONE LAYER OF A RESILIENT CONDUCTIVE MATERIAL, METHODS OF MOUNTING THE CONTACT STRUCTURES TO ELECTRONIC COMPONENTS, AND APPLICATIONS FOR EMPLOYING THE CONTACT STRUCTURES 90 2000
6,685,817 Method and apparatus for controlling plating over a face of a substrate 62 2000
6,622,103 System for calibrating timing of an integrated circuit wafer tester 90 2000
6,603,323 Closed-grid bus architecture for wafer interconnect structure 86 2000
6,727,580 Microelectronic spring contact elements 75 2000
6,539,531 Method of designing, fabricating, testing and interconnecting an IC to external circuit nodes 106 2000
6,835,898 ELECTRICAL CONTACT STRUCTURES FORMED BY CONFIGURING A FLEXIBLE WIRE TO HAVE A SPRINGABLE SHAPE AND OVERCOATING THE WIRE WITH AT LEAST ONE LAYER OF A RESILIENT CONDUCTIVE MATERIAL, METHODS OF MOUNTING THE CONTACT STRUCTURES TO ELECTRONIC COMPONENTS, AND APPLICATIONS FOR EMPLOYING THE CONTACT STRUCTURES 75 2000
6,778,406 Resilient contact structures for interconnecting electronic devices 96 2000
6,475,822 Method of making microelectronic contact structures 87 2000
6,597,187 Special contact points for accessing internal circuitry of an integrated circuit 73 2000
6,603,324 Special contact points for accessing internal circuitry of an integrated circuit 70 2000
6,606,575 Cross-correlation timing calibration for wafer-level IC tester interconnect systems 81 2000
6,621,260 Special contact points for accessing internal circuitry of an integrated circuit 75 2000
6,701,612 Method and apparatus for shaping spring elements 83 2000
6,713,374 Interconnect assemblies and methods 94 2000
6,836,962 Method and apparatus for shaping spring elements 70 2000
6,538,538 High frequency printed circuit board via 79 2001
6,791,176 Lithographic contact elements 77 2001
6,616,966 Method of making lithographic contact springs 121 2001
6,780,001 Forming tool for forming a contoured microelectronic spring mold 70 2001
6,501,343 Integrated circuit tester with high bandwidth probe assembly 88 2001
6,606,014 Filter structures for integrated circuit interfaces 61 2001
6,534,856 Sockets for "springed" semiconductor devices 86 2001
6,910,268 Method for fabricating an IC interconnect system including an in-street integrated circuit wafer via 104 2001
6,856,150 Probe card with coplanar daughter card 82 2001
6,627,980 Stacked semiconductor device assembly with microelectronic spring contacts 76 2001
6,538,214 Method for manufacturing raised electrical contact pattern of controlled geometry 74 2001
6,882,239 Electromagnetically coupled interconnect system 78 2001
6,888,362 Test head assembly for electronic components with plurality of contoured microelectronic spring contacts 86 2001
6,729,019 Method of manufacturing a probe card 94 2001
6,678,876 Process and apparatus for finding paths through a routing space 89 2001
6,862,727 Process and apparatus for adjusting traces 64 2001
6,764,869 Method of assembling and testing an electronics module 69 2001
6,714,828 Method and system for designing a probe card 72 2001
6,882,546 Multiple die interconnect system 71 2001
6,664,628 Electronic component overlapping dice of unsingulated semiconductor wafer 68 2001
6,456,103 Apparatus for reducing power supply noise in an integrated circuit 83 2001
6,759,311 Fan out of interconnect elements attached to semiconductor wafer 68 2001
6,817,052 Apparatuses and methods for cleaning test probes 76 2001
6,816,031 Adjustable delay transmission line 68 2001
6,624,648 Probe card assembly 100 2001
6,777,319 Microelectronic spring contact repair 73 2001
6,479,308 Semiconductor fuse covering 68 2001
6,615,485 Probe card assembly and kit, and methods of making same 83 2001
6,891,385 Probe card cooling assembly with direct cooling of active electronic components 77 2001
7,002,363 Method and system for compensating thermally induced motion of probe cards 115 2001
6,741,092 Method and system for detecting an arc condition 61 2001
6,864,105 Method of manufacturing a probe card 66 2002
6,680,659 Integrated circuit interconnect system 67 2002
6,784,674 Test signal distribution system for IC tester 74 2002
6,798,225 Tester channel to multiple IC terminals 76 2002
6,825,422 Interconnection element with contact blade 71 2002
6,812,691 Compensation for test signal degradation due to DUT fault 68 2002
6,640,415 Segmented contactor 100 2002
6,657,455 Predictive, adaptive power supply for an integrated circuit under test 78 2002
6,807,734 Microelectronic contact structures, and methods of making same 76 2002
6,559,671 Efficient parallel testing of semiconductor devices using a known good device to generate expected responses 72 2002
6,646,520 Integrated circuit interconnect system 69 2002
6,839,964 Method for manufacturing a multi-layer printed circuit board 64 2002
6,686,754 Integrated circuit tester with high bandwidth probe assembly 70 2002
6,678,850 Distributed interface for parallel testing of multiple devices using a single tester channel 72 2002
6,818,840 Method for manufacturing raised electrical contact pattern of controlled geometry 65 2002
6,642,625 Sockets for "springed" semiconductor devices 64 2002
6,661,316 High frequency printed circuit board via 67 2002
6,825,052 Test assembly including a test die for testing a semiconductor product die 79 2002
6,788,094 Wafer-level burn-in and test 74 2002
6,845,491 Method of designing, fabricating, testing and interconnecting an IC to external circuit nodes 68 2003
6,784,677 Closed-grid bus architecture for wafer interconnect structure 64 2003
6,911,835 High performance probe system 79 2003
6,838,893 Probe card assembly 66 2003
6,870,381 Insulative covering of probe tips 62 2003
6,911,814 Apparatus and method for electromechanical testing and validation of probe cards 69 2003
6,913,468 Methods of removably mounting electronic components to a circuit board, and sockets formed by the methods 81 2003
6,822,529 Integrated circuit interconnect system 66 2003
6,917,210 Integrated circuit tester with high bandwidth probe assembly 65 2003
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (36)
4,987,100 Flexible carrier for an electronic device 80 1989
5,001,423 Dry interface thermal chuck temperature control system for semiconductor wafer testing 130 1990
5,207,585 Thin interface pellicle for dense arrays of electrical interconnects 159 1990
5,061,192 High density connector 139 1990
5,334,931 Molded test probe assembly 92 1991
5,371,654 Three dimensional high performance interconnection package 214 1992
5,441,690 Process of making pinless connector 72 1993
5,537,372 High density data storage system with topographic contact sensor 110 1993
5,531,022 Method of forming a three dimensional high performance interconnection package 146 1994
5,532,608 Ceramic probe card and method for reducing leakage current 60 1995
5,804,982 Miniature probe positioning actuator 103 1995
5,810,607 Interconnector with contact pads having enhanced durability 157 1995
5,726,211 Process for making a foamed elastometric polymer 101 1996
5,756,021 Electronic devices comprising dielectric foamed polymers 87 1996
5,700,844 Process for making a foamed polymer 128 1996
5,785,538 High density test probe with rigid surface structure 85 1996
6,268,016 Manufacturing computer systems with fine line circuitized substrates 63 1996
5,723,347 Semi-conductor chip test probe and process for manufacturing the probe 105 1996
6,286,208 Interconnector with contact pads having enhanced durability 78 1996
5,838,160 Integral rigid chip test probe 81 1996
6,054,651 Foamed elastomers for wafer probing applications and interposer connectors 78 1996
5,926,029 Ultra fine probe contacts 104 1997
6,059,982 Micro probe assembly and method of fabrication 146 1997
5,804,607 Process for making a foamed elastomeric polymer 116 1997
6,062,879 High density test probe with rigid surface structure 78 1998
6,104,201 Method and apparatus for passive characterization of semiconductor substrates subjected to high energy (MEV) ion implementation using high-injection surface photovoltage 69 1998
6,332,270 Method of making high density integral test probe 78 1998
6,206,273 Structures and processes to create a desired probetip contact geometry on a wafer test probe 70 1999
6,452,406 Probe structure having a plurality of discrete insulated probe tips 76 1999
6,528,984 Integrated compliant probe for wafer level test and burn-in 102 1999
6,526,655 Angled flying lead wire bonding process 63 2001
6,788,093 Methodology and apparatus using real-time optical signal for wafer-level device dielectrical reliability studies 101 2002
6,943,571 Reduction of positional errors in a four point probe resistance measurement 59 2003
7,007,380 TFI probe I/O wrap test method 91 2004
7,011,531 Membrane probe with anchored elements 91 2005
7,005,879 Device for probe card power bus noise reduction 91 2005
 
AGILENT TECHNOLOGIES, INC. (30)
4,980,637 Force delivery system for improved precision membrane probe 94 1988
4,918,383 Membrane probe with automatic contact scrub action 151 1988
4,906,920 Self-leveling membrane probe 201 1988
5,172,051 Wide bandwidth passive probe 103 1991
5,298,972 Method and apparatus for measuring polarization sensitivity of optical devices 106 1991
5,274,336 Capacitively-coupled test probe 129 1992
5,463,324 Probe with contacts that interdigitate with and wedge between adjacent legs of an IC or the like 48 1993
5,507,652 Wedge connector for integrated circuits 39 1995
5,578,932 Method and apparatus for providing and calibrating a multiport network analyzer 141 1995
5,945,836 Loaded-board, guided-probe test fixture 118 1996
5,923,180 Compliant wafer prober docking adapter 70 1997
5,940,965 Method of making multiple lead voltage probe 30 1997
6,060,888 Error correction method for reflection measurements of reciprocal devices in vector network analyzers 111 1998
6,175,228 Electronic probe for measuring high impedance tri-state logic circuits 82 1998
6,300,775 Scattering parameter calibration system and method 126 1999
6,271,673 Probe for measuring signals 101 1999
6,407,562 Probe tip terminating device providing an easily changeable feed-through termination 85 1999
2001/0024,116 Electronic probe for measuring high impedance tri-state logic circuits 77 2001
6,643,597 Calibrating a test system using unknown standards 114 2001
6,717,426 Blade-like connecting needle 77 2002
6,864,694 Voltage probe 89 2002
2004/0095,145 Method and apparatus for performing multiport through-reflect-line calibration and measurement 94 2002
2004/0140,819 Differential voltage probe 28 2003
2004/0199,350 System and method for determining measurement errors of a testing device 92 2003
2005/0030,047 Method and apparatus for measuring a device under test using an improved through-reflect-line measurement calibration 81 2003
7,025,628 Electronic probe extender 95 2003
2004/0162,689 Multiport network analyzer calibration employing reciprocity of a device 91 2004
6,933,713 High bandwidth oscilloscope probe with replaceable cable 54 2004
7,005,868 Apparatus and method for canceling DC errors and noise generated by ground shield current in a probe 91 2004
7,026,834 Multiple two axis floating probe block assembly using split probe block 91 2005
 
CASCADE MICROTECH, INC. (27)
4,280,112 Electrical coupler 97 1979
4,697,143 Wafer probe 195 1984
4,764,723 Wafer probe 90 1986
4,827,211 Wafer probe 124 1987
4,858,160 System for setting reference reactance for vector corrected measurements 99 1988
4,849,689 Microwave wafer probe having replaceable probe tip 124 1988
5,012,186 Electrical probe with contact force protection 40 1990
5,045,781 High-frequency active probe having replaceable contact needles 108 1991
5,101,453 Fiber optic wafer probe 97 1991
5,506,515 High-frequency probe tip assembly 148 1994
5,610,529 Probe station having conductive coating added to thermal chuck insulator 134 1995
5,565,788 Coaxial wafer probe with tip shielding 143 1995
5,729,150 Low-current probe card with reduced triboelectric current generating cables 135 1995
5,914,613 Membrane probing system with local contact scrub 104 1996
6,232,789 Probe holder for low current measurements 87 1997
6,034,533 Low-current pogo probe card 105 1997
6,256,882 Membrane probing system 66 1998
6,384,615 Probe holder for low current measurements 41 2001
6,549,106 Waveguide with adjustable backshort 108 2001
6,496,024 Probe holder for testing of a test device 38 2002
6,850,082 Probe holder for testing of a test device 37 2002
6,724,205 Probe for combined signals 96 2002
6,815,963 Probe for testing a device under test 63 2003
6,806,724 Probe for combined signals 93 2003
6,930,498 Membrane probing system 54 2004
7,009,383 Wafer probe station having environment control enclosure 91 2004
7,271,603 Shielded probe for testing a device under test 32 2006
 
TOKYO ELECTRON LIMITED (25)
4,998,062 Probe device having micro-strip line structure 88 1989
5,091,692 Probing test device 112 1990
5,315,237 Touch sensor unit of prober for testing electric circuit and electric circuit testing apparatus using the touch sensor unit 106 1991
5,321,352 Probe apparatus and method of alignment for the same 130 1992
5,321,453 Probe apparatus for probing an object held above the probe card 100 1992
5,635,846 Test probe having elongated conductor embedded in an elostomeric material which is mounted on a space transformer 129 1993
5,404,111 Probe apparatus with a swinging holder for an object of examination 111 1993
5,517,126 Probe apparatus 127 1993
5,521,522 Probe apparatus for testing multiple integrated circuit dies 141 1993
5,811,982 High density cantilevered probe for electronic devices 112 1996
5,777,485 Probe method and apparatus with improved probe contact 117 1996
5,821,763 Test probe for high density integrated circuits, methods of fabrication thereof and methods of use thereof 162 1996
6,334,247 High density integrated circuit apparatus, test probe and methods of use thereof 83 1997
5,914,614 High density cantilevered probe for electronic devices 94 1997
5,999,268 Apparatus for aligning a semiconductor wafer with an inspection contactor 105 1997
6,300,780 High density integrated circuit apparatus, test probe and methods of use thereof 74 1998
6,124,725 Apparatus and method for testing semiconductor devices formed on a semiconductor wafer 127 1998
6,329,827 High density cantilevered probe for electronic devices 72 1998
6,722,032 Method of forming a structure for electronic devices contact locations 61 2001
7,005,842 Probe cartridge assembly and multi-probe assembly 91 2001
6,927,587 Probe apparatus 62 2003
6,906,542 Probing method and prober 59 2003
7,026,832 Probe mark reading device and probe mark reading method 92 2003
7,009,415 Probing method and probing apparatus 93 2004
7,023,226 Probe pins zero-point detecting method, and prober 91 2004
 
MICRON TECHNOLOGY, INC. (10)
4,312,117 Integrated test and assembly device 151 1979
4,970,386 Vertical FET high speed optical sensor 43 1989
5,487,999 Method for fabricating a penetration limited contact having a rough textured surface 159 1994
5,686,317 Method for forming an interconnect having a penetration limited contact structure for establishing a temporary electrical connection with a semiconductor die 235 1995
5,869,974 Micromachined probe card having compliant contact members for testing semiconductor wafers 168 1996
6,071,009 Semiconductor wirebond machine leadframe thermal map system 41 1997
6,181,144 Semiconductor probe card having resistance measuring circuitry and method fabrication 130 1998
6,924,653 Selectively configurable microelectronic probes 57 2002
7,026,835 Engagement probe having a grouping of projecting apexes for engaging a conductive pad 91 2002
7,009,188 Lift-out probe having an extension tip, methods of making and using, and analytical instruments employing same 95 2004
 
TEKTRONIX, INC. (10)
4,755,742 Dual channel time domain reflectometer 29 1986
4,739,259 Telescoping pin probe 99 1986
4,673,839 Piezoelectric pressure sensing apparatus for integrated circuit testing stations 121 1986
4,734,641 Method for the thermal characterization of semiconductor packaging systems 59 1987
4,749,942 Wafer probe head 81 1987
4,912,399 Multiple lead probe for integrated circuits in wafer form 112 1987
4,783,625 Wideband high impedance card mountable probe 95 1988
5,059,898 Wafer probe with transparent loading member 76 1990
5,136,237 Double insulated floating high voltage test probe 102 1991
5,412,330 Optical module for an optically based measurement system 92 1993
 
ADVANTEST CORPORATION (8)
5,644,248 Test head cooling system 82 1995
5,767,690 Test head cooling system 86 1997
6,031,384 IC testing method and apparatus 16 1997
6,191,596 Method for detecting a contact position between an object to be measured and measuring pins 79 1998
6,174,744 Method of producing micro contact structure and contact probe using same 135 2000
2002/0011,863 IC chip tester with heating element for preventing condensation 85 2001
7,020,360 Wavelength dispersion probing system 91 2002
6,937,040 Probe module and a testing apparatus 57 2004
 
FREESCALE SEMICONDUCTOR, INC. (8)
5,172,050 Micromachined semiconductor probe card 269 1991
5,177,438 Low resistance probe for semiconductor 164 1991
5,467,024 Integrated circuit test with programmable source for both AC and DC modes of operation 84 1993
5,617,035 Method for testing integrated devices 108 1995
5,666,063 Method and apparatus for testing an integrated circuit 105 1996
5,982,166 Method for measuring a characteristic of a semiconductor wafer using cylindrical control 106 1997
6,127,831 Method of testing a semiconductor device by automatically measuring probe tip parameters 100 1997
6,710,265 Multi-strand substrate for ball-grid array assemblies and method 12 2002
 
SV PROBE PTE LTD. (7)
5,521,518 Probe card apparatus 130 1991
5,180,977 Membrane probe contact bump compliancy system 139 1991
5,720,098 Method for making a probe preserving a uniform stress distribution under deflection 107 1995
5,742,174 Membrane for holding a probe tip in proper location 124 1995
5,623,213 Membrane probing of circuits 92 1996
5,973,504 Programmable high-density electronic device testing 97 1997
6,908,364 Method and apparatus for probe tip cleaning and shaping pad 55 2001
 
TEXAS INSTRUMENTS INCORPORATED (7)
4,888,550 Intelligent multiprobe tip 91 1983
5,159,752 Scanning electron microscope based parametric testing method and apparatus 117 1990
5,225,037 Method for fabrication of probe card for testing of semiconductor devices 212 1991
5,317,656 Fiber optic network for multi-point emissivity-compensated semiconductor wafer pyrometry 70 1993
6,906,539 High density, area array probe card apparatus 54 2001
6,911,834 Multiple contact vertical probe solution enabling Kelvin connection benefits for conductive bump probing 54 2002
7,026,833 Multiple-chip probe and universal tester contact assemblage 93 2005
 
HUGHES ELECTRONICS CORPORATION (6)
4,727,319 Apparatus for on-wafer testing of electrical circuits 74 1985
4,772,846 Wafer alignment and positioning apparatus for chip testing by voltage contrast electron microscopy 129 1986
4,908,570 Method of measuring FET noise parameters 43 1987
5,313,157 Probe for jesting an electrical circuit chip 91 1992
5,611,008 Substrate system for optoelectronic/microwave circuits 80 1996
5,623,214 Multiport membrane probe for full-wafer testing 105 1996
 
YOKOWO CO., LTD. (6)
6,900,647 Contact probe and probe device 102 2004
6,903,563 Contact probe and probe device 96 2004
6,917,211 Contact probe and probe device 54 2004
6,919,732 Contact probe and probe device 55 2004
6,937,042 Contact probe and probe device 55 2004
7,015,710 Contact probe and probe device 93 2004
 
DELAWARE CAPITAL FORMATION, INC. (5)
5,408,189 Test fixture alignment system for printed circuit boards 141 1992
5,289,117 Testing of integrated circuit devices on loaded printed circuit 54 1992
5,389,885 Expandable diaphragm test modules and connectors 94 1993
6,181,149 Grid array package test contactor 95 1996
6,064,218 Peripherally leaded package test contactor 102 1997
 
GLOBALFOUNDRIES INC. (5)
6,608,494 Single point high resolution time resolved photoemission microscopy system and method 107 1998
6,483,327 Quadrant avalanche photodiode time-resolved detection 103 1999
6,724,928 Real-time photoemission detection system 95 2000
6,488,405 Flip chip defect analysis using liquid crystal 97 2000
7,022,976 Dynamically adjustable probe tips 93 2003
 
NEC CORPORATION (5)
4,669,805 High frequency connector 57 1985
6,114,864 Probe card with plural probe tips on a unitary flexible tongue 106 1997
6,310,483 Longitudinal type high frequency probe for narrow pitched electrodes 99 1998
6,281,691 Tip portion structure of high-frequency probe and method for fabrication probe tip portion composed by coaxial cable 100 1999
6,400,168 Method for fabricating probe tip portion composed by coaxial cable 100 2001
 
ANRITSU COMPANY (4)
5,905,421 Apparatus for measuring and/or injecting high frequency signals in integrated systems 77 1997
6,169,410 Wafer probe with built in RF frequency conversion module 83 1998
6,529,844 Vector network measurement system 103 1999
6,943,563 Probe tone S-parameter measurements 56 2002
 
CANON KABUSHIKI KAISHA (4)
4,864,227 Wafer prober 125 1988
5,145,552 Process for preparing electrical connecting member 66 1990
5,731,920 Converting adapter for interchangeable lens assembly 91 1995
5,685,232 Positioning stage device exposure apparatus and device manufacturing method utilizing the same 112 1996
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (4)
5,691,503 Electro-magnetically shielded door hinge 41 1994
6,233,613 High impedance probe for monitoring fast ethernet LAN links 91 1997
2004/0201,388 Support for an electronic probe and related methods 39 2003
7,002,133 Detecting one or more photons from their interactions with probe photons in a matter system 91 2003
 
HUGHES AIRCRAFT COMPANY (4)
4,918,373 R.F. phase noise test set using fiber optic delay line 50 1988
4,835,495 Diode device packaging arrangement 40 1988
5,326,412 Method for electrodepositing corrosion barrier on isolated circuitry 71 1992
5,412,866 Method of making a cast elastomer/membrane test probe assembly 119 1993
 
LSI LOGIC CORPORATION (4)
6,927,079 Method for probing a semiconductor wafer 101 2000
6,605,951 Interconnector and method of connecting probes to a die for functional analysis 101 2000
6,617,866 Apparatus and method of protecting a probe card during a sort sequence 36 2001
7,023,225 Wafer-mounted micro-probing platform 92 2003
 
MOTOROLA, INC. (4)
4,232,398 Radio receiver alignment indicator 47 1978
4,646,005 Signal probe 97 1984
5,561,378 Circuit probe for measuring a differential circuit 30 1994
5,748,506 Calibration technique for a network analyzer 93 1996
 
SILICON VALLEY BANK (4)
4,893,914 Test station 110 1988
5,892,539 Portable emission microscope workstation for failure analysis 115 1995
6,744,268 High resolution analytical probe station 117 2002
6,917,195 Wafer probe station 54 2004
 
ENERGY, UNITED STATES DEPARTMENT OF (3)
4,287,473 Nondestructive method for detecting defects in photodetector and solar cell devices 107 1979
5,523,694 Integrated circuit failure analysis by low-energy charge-induced voltage alteration 118 1994
6,307,672 Microscope collision protection apparatus 79 1996
 
GENERAL ELECTRIC COMPANY (3)
6,927,598 Test probe for electrical devices having low or no wedge depression 55 2003
6,911,826 Pulsed eddy current sensor probes and inspection methods 61 2003
7,015,690 Omnidirectional eddy current probe and inspection system 96 2004
 
GGB INDUSTRIES, INC. (3)
4,871,964 Integrated circuit probing apparatus 90 1988
5,373,231 Integrated circuit probing apparatus including a capacitor bypass structure 118 1993
6,118,287 Probe tip structure 95 1997
 
IBIDEN CO., LTD. (3)
2004/0021,475 Wafer prober 79 2003
2004/0134,899 Ceramic substrate for a semiconductor-production/inspection device 78 2003
2004/0207,072 Ceramic substrate for a semiconductor producing/examining device 82 2004
 
INTERSTITIAL, LLC (3)
5,704,355 Non-invasive system for breast cancer detection 113 1995
5,829,437 Microwave method and system to detect and locate cancers in heterogenous tissues 117 1996
6,061,589 Microwave antenna for cancer detection system 113 1997
 
KABUSHIKI KAISHA TOSHIBA (3)
5,166,893 Portable apparatus having a voltage converter unit removable from a base unit having a removable display unit 46 1992
6,605,941 Method and apparatus for measuring characteristic of specimen and its application to high frequency response measurement with scanning probe microscopes 49 2001
7,032,307 Method for fabricating a probe pin for testing electrical characteristics of an apparatus 91 2004
 
MICROCONNECT LLC (3)
5,621,333 Contact device for making connection to an electronic circuit device 90 1995
6,046,599 Method and device for making connection 65 1997
6,091,256 Contact device for making connection to an electronic circuit device 62 1997
 
NATIONAL SEMICONDUCTOR CORPORATION (3)
4,757,255 Environmental box for automated wafer probing 180 1986
5,814,847 General purpose assembly programmable multi-chip package substrate 88 1996
5,883,522 Apparatus and method for retaining a semiconductor wafer during testing 105 1996
 
NEW WAVE RESEARCH (3)
5,811,751 Multi-wavelength laser system, probe station and laser cutter system using the same 134 1997
6,573,702 Method and apparatus for cleaning electronic test contacts 99 1997
5,963,364 Multi-wavelength variable attenuator and half wave plate 115 1997
 
OLYMPUS OPTICAL CO., LTD. (3)
5,367,165 Cantilever chip for scanning probe microscope 73 1993
6,006,002 Rigid sleeve device fitted over a flexible insertion section of an endoscope for inspecting industrial equipment 49 1995
6,811,406 Microelectronic spring with additional protruding member 145 2001
 
RAYTHEON COMPANY (3)
4,346,355 Radio frequency energy launcher 95 1980
5,069,628 Flexible electrical cable connector with double sided dots 70 1990
5,395,253 Membrane connector with stretch induced micro scrub 114 1993
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (3)
4,983,910 Millimeter-wave active probe 68 1988
4,916,002 Microcasting of microminiature tips 133 1989
5,003,253 Millimeter-wave active probe system 75 1989
 
THE BOEING COMPANY (3)
4,727,637 Computer aided connector assembly method and apparatus 109 1987
5,202,648 Hermetic waveguide-to-microstrip transition module 53 1991
6,914,427 Eddy current probe having sensing elements defined by first and second elongated coils and an associated inspection method 58 2003
 
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY (3)
5,361,049 Transition from double-ridge waveguide to suspended substrate 46 1986
5,430,813 Mode-matched, combination taper fiber optic probe 60 1993
6,940,264 Near field probe 57 2004
 
WENTWORTH LABORATORIES, INC. (3)
4,975,638 Test probe assembly for testing integrated circuit devices 143 1989
5,959,461 Probe station adapter for backside emission inspection 117 1997
6,927,586 Temperature compensated vertical pin probing device 57 2003
 
ADVANTEST (SINGAPORE) PTE LTD (2)
6,812,718 Massively parallel interface for electronic circuits 101 2001
6,917,525 Construction structures and manufacturing processes for probe card assemblies and packages having wafer level springs 94 2002
 
ADVANTEST AMERICA, INC (2)
6,295,729 Angled flying lead wire bonding process 73 1998
6,708,403 Angled flying lead wire bonding process 65 2003
 
AEROSPACE CORPORATION, THE (2)
6,211,663 Baseband time-domain waveform measurement method 112 1999
6,396,298 Active feedback pulsed measurement method 86 2000
 
BELL TELEPHONE LABORATORIES, INCORPORATED (2)
4,225,819 Circuit board contact contamination probe 56 1978
4,684,883 Method of manufacturing high-quality semiconductor light-emitting devices 93 1985
 
BRUKER NANO, INC. (2)
5,376,790 Scanning probe microscope 111 1992
5,672,816 Large stage system for scanning probe microscopes and other instruments 114 1995
 
CNH AMERICA LLC (2)
5,316,435 Three function control system 49 1992
5,360,312 Three function control mechanism 48 1992
 
DCG SYSTEMS, INC. (2)
5,530,372 Method of probing a net of an IC at an optimal probe-point 115 1994
5,675,499 Optimal probe point placement 106 1996
 
ELECTROGLAS, INC. (2)
5,656,942 Prober and tester with contact interface for integrated circuits-containing wafer held docked in a vertical plane 106 1995
6,320,372 Apparatus and method for testing a substrate having a plurality of terminals 99 1999
 
ELK FINANCIAL, INC. (2)
6,064,217 Fine pitch contact device employing a compliant conductive polymer bump 129 1996
2002/0011,859 METHOD FOR FORMING CONDUCTIVE BUMPS FOR THE PURPOSE OF CONTRRUCTING A FINE PITCH TEST DEVICE 104 1998
 
ELM TECHNOLOGY CORPORATION (2)
5,020,219 Method of making a flexible tester surface for testing integrated circuits 160 1989
5,453,404 Method for making an interconnection structure for integrated circuits 124 1994
 
EMIMAGING LTD (2)
5,715,819 Microwave tomographic spectroscopy system and method 101 1994
6,490,471 Electromagnetical imaging and therapeutic (EMIT) systems 85 2001
 
EUROPAISCHES LABORATORIUM FUR MOLEKULARBIOLOGIE (EMBL) (2)
6,798,226 Multiple local probe measuring device and method 88 2002
6,943,574 Multiple local probe measuring device and method 59 2004
 
HEWLETT-PACKARD COMPANY (2)
4,795,962 Floating driver circuit and a device for measuring impedances of electrical components 93 1987
5,133,119 Shearing stress interconnection apparatus and method 64 1991
 
HITACHI, LTD. (2)
7,012,871 Information recording method and apparatus with suppressed mark edge jitters 76 2004
2005/0186,696 Gas flowmeter and manufacturing method thereof 2005
 
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (2)
6,049,216 Contact type prober automatic alignment 91 1997
7,012,441 High conducting thin-film nanoprobe card and its fabrication method 102 2003
 
INTEL CORPORATION (2)
5,944,093 Pickup chuck with an integral heat pipe 99 1997
7,020,363 Optical probe for wafer testing 92 2001
 
KLA-TENCOR CORPORATION (2)
6,633,174 Stepper type test structures and methods for inspection of semiconductor integrated circuits 98 2000
6,771,806 Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devices 125 2000
 
LUCENT TECHNOLOGIES INC. (2)
5,970,429 Method and apparatus for measuring electrical noise in devices 115 1997
6,121,836 Differential amplifier 37 1998
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (2)
5,594,358 Radio frequency probe and probe card including a signal needle and grounding needle coupled to a microstrip transmission line 96 1994
5,794,133 Microwave mixing circuit 81 1996
 
MICROWAVE IMAGING SYSTEMS TECHNOLOGIES, INC. (2)
5,841,288 Two-dimensional microwave imaging apparatus and methods 112 1997
6,448,788 Fixed array microwave imaging apparatus and method 98 2000
 
MITSUBISHI DENKI KABUSHIKI KAISHA (2)
5,493,236 Test analysis apparatus and analysis method for semiconductor wafer using OBIC analysis 182 1994
6,404,213 Probe stylus 82 1999
 
NORTHROP GRUMMAN SYSTEMS CORPORATION (2)
5,479,109 Testing device for integrated circuits on wafer 116 1994
6,040,739 Waveguide to microstrip backshort with external spring compression 67 1998
 
RENESAS ELECTRONICS CORPORATION (2)
6,900,646 Probing device and manufacturing method thereof, as well as testing apparatus and manufacturing method of semiconductor with use thereof 95 2002
6,551,884 Semiconductor device including gate insulation films having different thicknesses 69 2002
 
RENISHAW PLC (2)
5,270,664 Probe for measuring surface roughness by sensing fringe field capacitance effects 121 1992
6,909,983 Calibration of an analogue probe 63 2002
 
SAMSUNG ELECTRONICS CO., LTD. (2)
6,900,653 Needle fixture of a probe card in semiconductor inspection equipment and needle fixing method thereof 104 2003
6,909,297 Probe card 54 2004
 
SEMATECH, INC. (2)
5,159,264 Pneumatic energy fluxmeter 78 1991
5,159,267 Pneumatic energy fluxmeter 80 1992
 
SHARP KABUSHIKI KAISHA (2)
4,899,126 Thick film resistor type printed circuit board 70 1989
5,089,774 Apparatus and a method for checking a semiconductor 126 1990
 
SOLID STATE MEASUREMENTS, INC. (2)
6,900,652 Flexible membrane probe and method of use thereof 104 2003
7,023,231 Work function controlled probe for measuring properties of a semiconductor wafer and method of use thereof 92 2004
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (2)
6,909,300 Method for fabricating microelectronic fabrication electrical test apparatus electrical probe tip having pointed tips 54 2002
6,902,941 Probing of device elements 98 2003
 
W. L. GORE & ASSOCIATES, INC. (2)
5,896,038 Method of wafer level burn-in 104 1996
7,015,708 Method and apparatus for a high frequency, impedance controlled probing device with flexible ground contacts 93 2003
 
XEROX CORPORATION (2)
4,780,670 Active probe card for high resolution/low noise wafer level testing 132 1985
6,352,454 Wear-resistant spring contacts 81 1999
 
YULIM HITECH, INC. (2)
6,922,069 Needle assembly of probe card 60 2003
7,014,499 Probe card for testing semiconductor device 91 2005
 
3M INNOVATIVE PROPERTIES COMPANY (1)
6,902,416 High density probe device 73 2002
 
ABB POWER T&D COMPANY, INC., A DE CORP. (1)
4,998,063 Fiber optic coupled magneto-optic sensor having a concave reflective focusing surface 39 1989
 
ABBOTT LABORATORIES (1)
6,096,561 Scheduling operation of an automated analytical system 52 1996
 
ADE CORPORATION (1)
5,642,298 Wafer testing and self-calibration system 105 1996
 
ADVANCED MICRO DEVICES, INC. (1)
6,396,296 Method and apparatus for electrical characterization of an integrated circuit package using a vertical probe station 95 2000
 
AEHR TEST SYSTEMS (1)
6,340,895 Wafer-level burn-in and test cartridge 99 1999
 
AG COMMUNICATION SYSTEMS CORPORATION, 2500 W. UTOPIA RD., PHOENIX, AZ 85027, A DE CORP. (1)
4,684,884 Universal test circuit for integrated circuit packages 74 1985
 
ALBANY INSTRUMENTS, INC. (1)
6,933,717 Sensors and probes for mapping electromagnetic fields 57 2004
 
ALERI INC. (1)
6,924,655 Probe card for use with microelectronic components, and methods for making same 55 2003
 
ALSTOM (1)
5,813,847 Device and method for injecting fuels into compressed gaseous media 75 1996
 
AMP INCORPORATED (1)
4,652,082 Angled electro optic connector 56 1984
 
AMPEX CORPORATION (1)
4,375,631 Joystick control 61 1981
 
APPLIED MATERIALS, INC. (1)
6,232,787 Microstructure defect detection 151 1999
 
ARIES ELECTRONICS, INC. (1)
6,937,045 Shielded integrated circuit probe 61 2004
 
ASAHI KOGAKU KOGYO KABUSHIKI KAISHA (1)
5,267,088 Code plate mounting device 82 1990
 
AT & T TECHNOLOGIES, INC., (1)
4,837,507 High frequency in-circuit test fixture 73 1987
 
ATG TEST SYSTEMS GMBH & CO. KG (1)
7,015,711 Apparatus and method for the testing of circuit boards, and test probe for this apparatus and this method 103 2004
 
ATMEL CORPORATION (1)
4,649,339 Integrated circuit interface 113 1984
 
AUTOCYTE NORTH CAROLINA, L.L.C. (1)
5,659,421 Slide positioning and holding device 102 1995
 
BARKER REVOCABLE TRUST U/A/D (1)
5,202,558 Flexible fiber optic probe for high-pressure shock experiments 101 1992
 
BILL, ELVIN STUART, 3 MARK ST., DUNDAS VALLEY, 2117 (1)
4,223,658 Elastic band projecting toy gun 50 1978
 
BRUKER BIOSPIN CORPORATION (1)
6,933,725 NMR probe circuit for generating close frequency resonances 59 2004
 
CALIFORNIA INSTITUTE OF TECHNOLOGY (1)
5,138,289 Noncontacting waveguide backshort 40 1990
 
CBC CORPORATION (1)
4,306,235 Multiple frequency microwave antenna 40 1978
 
CERPROBE CORPORATION (1)
6,002,426 Inverted alignment station and method for calibrating needles of probe card for probe testing of integrated circuits 108 1997
 
CHENG, DAVID (1)
5,479,108 Method and apparatus for handling wafers 155 1992
 
CHEROKEE METALS COMPANY (1)
6,257,565 Decking clamp and method of making the same 22 2000
 
CHIPMOS TECHNOLOGIES INC. (1)
6,946,860 Modularized probe head 54 2003
 
CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY (1)
6,759,859 Resilient and rugged multi-layered probe 32 2001
 
CIRCUIT COMPONENTS, INCORPORATED (1)
4,793,814 Electrical circuit board interconnect 254 1986
 
CIRREX SYSTEMS LLC (1)
6,222,970 Methods and apparatus for filtering an optical fiber 129 1999
 
COM DEV LTD. (1)
5,841,342 Voltage controlled superconducting microwave switch and method of operation thereof 40 1995
 
COMMSCOPE, INC. OF NORTH CAROLINA (1)
6,407,542 Implementation of a multi-port modal decomposition system 42 2000
 
CONIFER CORPORATION (1)
5,293,175 Stacked dual dipole MMDS feed 133 1993
 
CONTEL FEDERAL SYSTEMS, INC., A DE CORP. (1)
4,184,729 Flexible connector cable 104 1977
 
CREE, INC. (1)
5,804,483 Method for producing a channel region layer in a sic-layer for a voltage controlled semiconductor device 33 1996
 
CROWN CORK & SEAL TECHNOLOGIES CORPORATION (1)
6,130,536 Preform test fixture and method of measuring a wall thickness 37 1998
 
CROWN PRODUCTS, INC. (1)
7,019,541 Electric conductivity water probe 94 2004
 
DAINIPPON SCREEN MFG. CO., LTD. (1)
4,746,857 Probing apparatus for measuring electrical characteristics of semiconductor device formed on wafer 94 1986
 
DEBIOTECH S.A. (1)
7,005,078 Micromachined fluidic device and method for making same 116 2001
 
DELPHI TECHNOLOGIES, INC. (1)
7,015,709 Ultra-broadband differential voltage probes 97 2004
 
DEUTSCHE THOMSON-BRANDT GMBH (1)
4,685,150 Tuning of a resonant circuit in a communications receiver 53 1984
 
EAST GIANT LIMITED (1)
5,879,289 Hand-held portable endoscopic camera 141 1996
 
ECLIPSE SURGICAL TECHNOLOGIES, INC. (1)
5,728,091 Optical fiber for myocardial channel formation 55 1995
 
ELECTRONICS RESEARCH, INC. (1)
2004/0100,276 Method and apparatus for calibration of a vector network analyzer 98 2002
 
FELTEN & GUILLEAUME ENERGIETECHNIK AG (1)
4,972,073 Light wave conductor-bending sensor with sliding rails for monitoring bridge structures or the like 46 1990
 
FLUKE CORPORATION (1)
6,384,614 Single tip Kelvin probe 100 2000
 
FORMFACTOR, ET AL. (1)
6,937,037 Probe card assembly for contacting a device with raised contact elements 59 2002
 
FRAMATOME TECHNOLOGIES, INC. (1)
5,756,908 Probe positioner 41 1996
 
FRESH QUEST CORPORATION (1)
5,589,781 Die carrier apparatus 72 1993
 
FUJI PHOTO FILM CO., LTD. (1)
4,727,391 Sheet film package and device for loading sheet films 80 1987
 
FUJITA, TAKAFUMI (1)
6,933,736 Prober 56 2003
 
GCB INDUSTRIES, INC. (1)
6,229,327 Broadband impedance matching probe 101 1997
 
GEC FERRANTI DEFENCE SYSTEMS LIMITED (1)
4,714,873 Microwave noise measuring apparatus 48 1986
 
GEMSTAR DEVELOPMENT CORPORATION (1)
5,335,079 Apparatus and method using compressed codes for recorder preprogramming 136 1991
 
GILLESPIE, ROBB S. (1)
6,481,939 Tool tip conductivity contact sensor and method 86 2001
 
GOOGLE INC. (1)
6,078,500 Pluggable chip scale package 103 1998
 
HAMAMATSU PHOTONICS K.K. (1)
4,922,186 Voltage detector 80 1988
 
HERSTEIN, DOV (1)
4,810,981 Assembly of microwave components 88 1987
 
HITACHI SOFTWARE ENGINEERING CO., LTD. (1)
7,035,738 Probe designing apparatus and probe designing method 92 2002
 
HITACHI ULSI SYSTEMS CO., LTD. (1)
6,734,687 Apparatus for detecting defect in device and method of detecting defect 107 2001
 
HONEYWELL INC. (1)
5,347,204 Position dependent rate dampening in any active hand controller 55 1992
 
HYNIX SEMICONDUCTOR INC. (1)
7,002,364 Semiconductor device for reducing the number of probing pad used during wafer test and method for testing the same 94 2003
 
HYPERVISION, INC. (1)
5,475,316 Transportable image emission microscope 129 1993
 
HYPRES, INC. (1)
4,894,612 Soft probe for providing high speed on-wafer connections to a circuit 153 1988
 
INTEGRAL TECHNOLOGIES, INC. (1)
7,006,046 Low cost electronic probe devices manufactured from conductive loaded resin-based materials 93 2004
 
INTEGRATED TECHNOLOGY CORPORATION (1)
6,118,894 Integrated circuit probe card inspection system 113 1997
 
INTEST CORPORATION (1)
5,900,737 Method and apparatus for automated docking of a test head to a device handler 112 1996
 
INTEST IP CORPORATION (1)
4,705,447 Electronic test head positioner for test systems 127 1985
 
IWASAKI CORRESPOND INDUSTRY CO., LTD. (1)
6,933,737 Probe card 54 2003
 
JEOL RESONANCE INC. (1)
6,914,430 NMR probe 56 2004
 
JOHN H. BLANZ COMPANY, INC. (1)
5,097,207 Temperature stable cryogenic probe station 105 1989
 
JPK INSTRUMENTS AG (1)
7,022,985 Apparatus and method for a scanning probe microscope 97 2002
 
JSR CORPORATION (1)
7,071,722 Anisotropic, conductive sheet and impedance measuring probe 34 2003
 
KAI TECHNOLOGIES, INC. (1)
6,275,738 Microwave devices for medical hyperthermia, thermotherapy and diagnosis 114 1999
 
KAISER OPTICAL SYSTEMS (1)
6,907,149 Compact optical measurement probe 61 2003
 
KEITHLEY INSTRUMENTS, INC. (1)
6,104,206 Product wafer junction leakage measurement using corona and a kelvin probe 110 1997
 
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY (1)
6,528,993 Magneto-optical microscope magnetometer 78 2000
 
L&P PROPERTY MANAGEMENT COMPANY (1)
5,505,150 Method and apparatus for facilitating loop take time adjustment in multi-needle quilting machine 84 1994
 
L-3 COMMUNICATIONS ELECTRON TECHNOLOGIES, INC. (1)
5,148,131 Coaxial-to-waveguide transducer with improved matching 43 1991
 
LAM RESEARCH CORPORATION (1)
7,015,703 Radio frequency Langmuir probe 93 2004
 
LAURENCE J. MARHOEFER (1)
5,097,101 Method of forming a conductive contact bump on a flexible substrate and a flexible substrate 92 1991
 
LEXMARK INTERNATIONAL, INC. (1)
6,154,238 Scanning print head 42 1997
 
LION APPAREL, INC. (1)
5,157,790 Firefighter garment with lumbar support 46 1991
 
LOGICVISION, INC. (1)
2005/0229,053 Circuit and method for low frequency testing of high frequency signal waveforms 30 2004
 
MAGMA DESIGN AUTOMATION, INC. (1)
5,030,907 CAD driven microprobe integrated circuit tester 110 1989
 
MATRA BAE DYNAMICS (UK) LIMITED (1)
5,266,963 Integrated antenna/mixer for the microwave and millimetric wavebands 51 1991
 
MATTSON TECHNOLOGY, INC. (1)
6,172,337 System and method for thermal processing of a semiconductor substrate 99 1999
 
MEDXENSE AS (1)
7,003,184 Fiber optic probes 101 2001
 
MENTOR GRAPHICS CORPORATION (1)
5,383,787 Integrated circuit package with direct access to internal signals 58 1993
 
MERCK & CO., INC. (1)
7,013,221 Iterative probe design and detailed expression profiling with flexible in-situ synthesis arrays 92 2000
 
MESO SCALE TECHNOLOGIES, LLC (1)
2005/0142,033 Modular assay plates, reader systems and methods for test measurements 52 2004
 
MITEL SEMICONDUCTOR LIMITED (1)
5,764,070 Structure for testing bare integrated circuit devices 57 1996
 
MITSUBISHI GAS CHEMICAL COMPANY, INC. (1)
6,222,031 Process for preparing water-soluble tricarboxypolysaccharide 80 1998
 
MOTOROLA MOBILITY LLC (1)
5,751,153 Method and apparatus for characterizing a multiport circuit 39 1996
 
MTU MOTOREN- UND TURBINEN-UNION MUENCHEN GMBH (1)
5,232,789 Structural component with a protective coating having a nickel or cobalt basis and method for making such a coating 89 1992
 
MURATA MANUFACTURING CO., LTD. (1)
6,838,885 Method of correcting measurement error and electronic component characteristic measurement apparatus 97 2003
 
NCR CORPORATION (1)
6,816,840 System and method of sending messages to a group of electronic price labels 37 1998
 
NEBRASKA ELECTRONICS, INC. (1)
5,481,196 Process and apparatus for microwave diagnostics and therapy 82 1994
 
NEC ELECTRONICS CORPORATION (1)
6,320,396 Parasitic MIM structural spot analysis method for semiconductor device and parasitic MIM structure spot analysis method for silicon semiconductor device 97 1997
 
NEWPORT FAB, LLC (1)
6,727,716 Probe card and probe needle for high frequency testing 93 2002
 
NIHON DENSHIZAIRYO KABUSHIKI KAISHA (1)
5,134,365 Probe card in which contact pressure and relative position of each probe end are correctly maintained 85 1991
 
NIKON CORPORATION (1)
6,628,503 Gas cooled electrostatic pin chuck for vacuum applications 94 2001
 
NISSAN CHEMICAL INDUSTRIES, LTD. (1)
5,021,186 Chloroisocyanuric acid composition having storage stability 74 1989
 
NITTO DENKO CORPORATION (1)
5,977,783 Multilayer probe for measuring electrical characteristics 61 1997
 
NORTEL NETWORKS LIMITED (1)
4,853,624 Tunable microwave wafer probe 91 1988
 
NORTHROP GRUMMAN CORPORATION (1)
4,216,467 Hand controller 186 1977
 
NUCLEAR FILTER TECHNOLOGY, INC. (1)
6,948,391 Probe with integral vent, sampling port and filter element 57 2003
 
NXP B.V. (1)
6,275,043 Test device for testing a module for a data carrier intended for contactless communication 41 1999
 
OKI SEMICONDUCTOR CO., LTD. (1)
6,927,078 Method of measuring contact resistance of probe and method of testing semiconductor device 58 2003
 
OL SECURITY LIMITED LIABILITY COMPANY (1)
5,688,618 Millimeter wave device and method of making 41 1995
 
OLAER INDUSTRIES (1)
4,788,851 Pressure vessel incorporating a sensor for detecting liquid in a gas chamber 42 1987
 
OLYMPUS CORPORATION (1)
4,696,544 Fiberscopic device for inspection of internal sections of construction, and method for using same 89 1985
 
OPTOMETRIX, INC. (1)
6,181,416 Schlieren method for imaging semiconductor device properties 80 1999
 
PACIFIC WESTERN SYSTEMS, INC. (1)
4,251,772 Probe head for an automatic semiconductive wafer prober 45 1978
 
PHILIPS ELECTRONICS NORTH AMERICA CORPORATION (1)
4,593,243 Coplanar and stripline probe card apparatus 112 1984
 
PREMIER MICROWAVE OF CALIFORNIA, INC. (1)
4,740,764 Pressure sealed waveguide to coaxial line connection 45 1987
 
PREMTEK INTERNATIONAL INC. (1)
2005/0116,730 DOUBLE-FACED DETECTING DEVICES FOR AN ELECTRONIC SUBSTRATE 27 2003
 
PRODONT, INC. (1)
7,034,553 Direct resistance measurement corrosion probe 94 2003
 
QINETIQ LIMITED (1)
5,803,607 Method and apparatus for measurement of unsteady gas temperatures 41 1997
 
RCA CORPORATION (1)
4,284,033 Means to orbit and rotate target wafers supported on planet member 112 1979
 
RELIABILITY INCORPORATED (1)
2002/0070,745 Cooling system for burn-in unit 82 2000
 
RESEARCH ORGANIZATION FOR CIRCUIT KNOWLEDGE (1)
5,584,120 Method of manufacturing printed circuits 75 1994
 
ROBERT BOSCH GMBH (1)
6,948,981 Compact coupler plug, particularly for a planar broadband lambda probe, in which single-conductor seals are prevented from being lost 53 2002
 
ROCKSTAR BIDCO, LP (1)
6,753,679 Test point monitor using embedded passive resistance 81 2002
 
ROCKWELL INTERNATIONAL CORPORATION (1)
4,184,133 Assembly of microwave integrated circuits having a structurally continuous ground plane 51 1977
 
ROSENBERGER HOCHFREQUENZTECHNIK GMBH & CO. KG (1)
2004/0066,181 High-frequency probe tip 79 2003
 
ROUND ROCK RESEARCH, LLC (1)
5,126,286 Method of manufacturing edge connected semiconductor die 143 1990
 
RUDOLPH TECHNOLOGIES, INC. (1)
6,710,798 Methods and apparatus for determining the relative positions of probe tips on a printed circuit board probe card 105 1999
 
SAE MAGNETICS (H.K.) LTD. (1)
7,015,689 Connection method for probe pins for measurement of characteristics of thin-film magnetic head and characteristic measurement method for thin-film magnetic head 93 2003
 
SANDIA CORPORATION (1)
6,078,183 Thermally-induced voltage alteration for integrated circuit analysis 127 1998
 
SANTRONICS, INC. (1)
7,030,599 Hand held voltage detection probe 95 2004
 
SCIENCE & TECHNOLOGY CORPORATION @ UNM (1)
6,549,022 Apparatus and method for analyzing functional failures in integrated circuits 121 2000
 
SEIKO INSTRUMENTS INC. (1)
7,015,455 Near-field optical probe 91 2005
 
SEMCO MACHINE CORPORATION (1)
5,550,481 Circuit board test fixture apparatus with cam rotably mounted in slidable cam block and method for making 40 1995
 
SEMICONDUCTOR PHYSICS LABORATORY, INC. (1)
6,052,653 Spreading resistance profiling system 98 1997
 
SEMITEST, INC. (1)
4,891,584 Apparatus for making surface photovoltage measurements of a semiconductor 134 1988
 
SENSHIN CAPITAL, LLC (1)
5,633,780 Electrostatic discharge protection device 112 1996
 
SHOSHOTECH CO., LTD. (1)
6,351,885 Method of making conductive bump on wiring board 60 1998
 
SIEMENS AKTIENGESELLSCHAFT (1)
4,805,627 Method and apparatus for identifying the distribution of the dielectric constants in an object 97 1986
 
SII NANOTECHNOLOGY INC. (1)
6,621,082 Automatic focusing system for scanning electron microscope equipped with laser defect detection function 97 2002
 
SINGULUS TECHNOLOGIES GMBH (1)
5,876,082 Device for gripping and holding substrates 68 1997
 
SLOAN TECHNOLOGY CORPORATION, A CORP. OF CA (1)
4,707,657 Connector assembly for a circuit board testing machine, a circuit board testing machine, and a method of testing a circuit board by means of a circuit board testing machine 147 1985
 
SMITHS GROUP PLC (1)
4,706,050 Microstrip devices 77 1985
 
SNAP-ON TECHNOLOGIES, INC. (1)
6,940,283 Detecting field from different ignition coils using adjustable probe 52 2003
 
SONY CORPORATION (1)
8,035,987 Electronic device having a groove partitioning functional and mounting parts from each other 34 2007
 
SONY ELECTRONICS INC. (1)
5,669,316 Turntable for rotating a wafer carrier 98 1993
 
SPAR AEROSPACE LIMITED (1)
5,116,180 Human-in-the-loop machine control loop 238 1990
 
ST. CLAIR INTELLECTUAL PROPERTY CONSULTANTS, INC. (1)
4,904,933 Integrated circuit probe station 111 1986
 
STAR TECHNOLOGIES INC. (1)
6,906,543 Probe card for electrical testing a chip in a wide temperature range 60 2003
 
STOVOKOR TECHNOLOGY LLC (1)
4,991,290 Flexible electrical interconnect and method of making 100 1989
 
SUMITOMO ELECTRIC INDUSTRIES, LTD. (1)
4,818,059 Optical connector and splicer 83 1987
 
SUMITOMO WIRING SYSTEMS, LTD. (1)
5,627,473 Connector inspection device 41 1995
 
SWCC SHOWA CABLE SYSTEMS CO., LTD. (1)
6,944,380 Optical fiber for transmitting ultraviolet ray, optical fiber probe, and method of manufacturing the optical fiber probe 54 2002
 
SYNERGETICS USA, INC. (1)
6,572,608 Directional laser probe 50 2000
 
TDK CORPORATION (1)
7,012,425 Eddy-current probe 93 2005
 
TELEDYNE LECROY, INC. (1)
7,019,544 Transmission line input structure test probe 93 2004
 
TELEFONAKTIEBOLAGET LM ERICSSON (PUBL) (1)
5,996,102 Assembly and method for testing integrated circuit devices 87 1997
 
TEMPTRONIC CORPORATION (1)
6,415,858 Temperature control system for a workpiece chuck 91 1997
 
TERADYNE, INC. (1)
6,784,679 Differential coaxial contact array for high-density, high-speed signals 91 2002
 
THE REGENTS OF THE UNIVERSITY OF MICHIGAN (1)
6,906,506 Method and apparatus for simultaneous measurement of electric field and temperature using an electrooptic semiconductor probe 54 2002
 
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE AIR FORCE (1)
6,215,295 Photonic field probe and calibration means thereof 111 1998
 
THERMOCARBON, INC. (1)
5,676,360 Machine tool rotary table locking apparatus 112 1995
 
THK CO., LTD. (1)
4,899,998 Rotational positioning device 105 1988
 
THOMSON HYBRIDES ET MICROONDES (1)
4,901,012 Circuit for measuring the dynamic characteristics of a package for high-speed integrated circuits and a method for measuring said dynamic characteristics 39 1987
 
TIOGA TECHNOLOGIES, INC. (1)
6,459,739 Method and apparatus for RF common-mode noise rejection in a DSL receiver 101 1999
 
TOKYO OHKA KOGYO CO., LTD. (1)
5,571,324 Rotary-cup coating apparatus 102 1994
 
TOTAL FINA ELF (1)
2002/0197,174 Electrical pump, and method for using plurality of submersible electrical pumps for well completion 2002
 
TRIGON (1)
4,340,860 Integrated circuit carrier package test probe 67 1980
 
TRIQUINT SEMICONDUCTOR, INC. (1)
4,853,627 Wafer probes 101 1988
 
TRW INC. (1)
5,126,696 W-Band waveguide variable controlled oscillator 41 1991
 
U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL TRUSTEE (1)
4,926,172 Joystick controller 52 1988
 
U.S. PHILIPS CORPORATION (1)
4,663,840 Method of interconnecting conductors of different layers of a multilayer printed circuit board 72 1985
 
UNIVERSITY OF KANSAS (1)
6,937,020 Solid-state nuclear magnetic resonance probe 60 2004
 
UNIVERSITY OF MASSACHUSETTS (1)
5,233,197 High speed digital imaging microscope 110 1991
 
VATELL CORPORATION (1)
6,278,051 Differential thermopile heat flux transducer 90 2000
 
VEECO METROLOGY INC. (1)
7,001,785 Capacitance probe for thin dielectric film characterization 98 2004
 
VERIGY (SINGAPORE) PTE. LTD. (1)
2005/0068,054 Standardized layout patterns and routing structures for integrated circuit wafer probe card assemblies 28 2004
 
WESTERNGECO L.L.C. (1)
6,912,468 Method and apparatus for contemporaneous utilization of a higher order probe in pre-stack and post-stack seismic domains 52 2003
 
WESTINGHOUSE ELECTRIC CORP. (1)
4,302,146 Probe positioner 46 1978
 
WINBOND ELECTRONICS CORP. (1)
6,611,417 Wafer chuck system 79 2001
 
WISCONSIN ALUMNI RESEARCH FOUNDATION (1)
2003/0088,180 Space-time microwave imaging for cancer detection 94 2002
 
YAMAICHI ELECTRONICS CO., LTD. (1)
6,946,375 Manufacture of probe unit having lead probes extending beyond edge of substrate 33 2002
 
YUGEN KAISHA SOZOAN (1)
5,481,936 Rotary drive positioning system for an indexing table 110 1994
 
ZENITH ELECTRONICS CORPORATION (1)
4,755,872 Impulse pay per view system and method 78 1985
 
OTHER [CHECK PATENT PROFILE FOR ASSIGNMENT INFORMATION] (14)
4,641,659 Medical diagnostic microwave scanning apparatus 105 1982
4,791,363 Ceramic microstrip probe blade 135 1987
4,988,062 Apparatus, system and method for organizing and maintaining a plurality of medical catheters and the like 91 1988
4,922,912 MAP catheter 107 1988
5,414,565 Tilting kinematic mount 83 1991
5,670,888 Method for transporting and testing wafers 124 1995
5,621,400 Ice detection method and apparatus for an aircraft 41 1995
5,831,442 Handling device 94 1996
6,307,363 Ultrahigh-frequency high-impedance passive voltage probe 46 1998
6,327,034 Apparatus for aligning two objects 88 1999
2001/0002,794 Split resistor probe and method 77 2001
2003/0139,662 Method and apparatus for detecting, identifying and performing operations on microstructures including, anthrax spores, brain cells, cancer cells, living tissue cells, and macro-objects including stereotactic neurosurgery instruments, weapons and explosives 80 2002
7,015,707 Micro probe 107 2003
2004/0193,382 Method and apparatus for calibrating a multiport test system for measurement of a DUT 94 2004

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
CASCADE MICROTECH, INC. (8)
7,764,072 Differential signal probing system 1 2007
7,723,999 Calibration structures for differential signal probing 0 2007
7,688,097 Wafer probe 1 2007
7,761,983 Method of assembling a wafer probe 1 2007
7,750,652 Test structure and probe for differential signals 2 2008
8,013,623 Double sided probing structures 0 2008
7,759,953 Active wafer probe 0 2008
7,898,273 Probe for testing a device under test 0 2009
 
FORMFACTOR, INC. (1)
7,579,856 Probe structures with physically suspended electronic components 2 2006
 
ROSENBERGER HOCHFREQUENZTECHNIK GMBH & CO. KG (1)
7,786,741 Measuring tip for high-frequency measurement 0 2005

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