Optical component that includes a material having a thermal longitudinal expansion with a zero crossing
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United States of America Patent
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Sep 23, 2008
Grant Date -
Sep 22, 2005
app pub date -
Jan 24, 2005
filing date -
Jul 24, 2002
priority date (Note) -
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Abstract
There is provided an optical component. The optical component includes a material having a surface that heats to a maximum temperature (T.sub.max) when subjected to radiation. The material has a temperature-dependent coefficient of thermal expansion (.alpha.(T)) of about zero at a temperature T.sub.0 that is approximately equal to T.sub.max. The optical component is suitable for use in any of an illumination system, a projection objective or a projection exposure system, as employed, for example, for EUV microlithography.
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