Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge
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United States of America Patent
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Sep 23, 2008
Grant Date -
Mar 13, 2008
app pub date -
Jul 3, 2007
filing date -
Jun 19, 2002
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Abstract
A method of fabricating a spatial light modulator. The method includes forming cavities in a first substrate and fabricating electrodes on a second substrate. The method also includes bonding the first substrate to the second substrate and forming a mirror plate from a portion of the first substrate. The mirror plate has an upper surface and a lower surface. The method further includes forming a hinge coupled to the mirror plate and forming a reflective surface coupled to the upper surface of the mirror plate.
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