O-ringless tandem throttle valve for a plasma reactor chamber
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United States of America Patent
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Sep 30, 2008
Grant Date -
Oct 26, 2006
app pub date -
Apr 26, 2005
filing date -
Apr 26, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A valve system having high maximum gas flow rate and fine control of gas flow rate, includes a valve housing for blocking gas flow through a gas flow path, a large area opening through said housing having a first arcuate side wall and a small area opening through said housing having a second arcuate side wall, and respective large area and small area rotatable valve flaps in said large area and small area openings, respectively, and having arcuate edges congruent with said first and second arcuate side walls, respectively and defining therebetween respective first and second valve gaps. The first and second valve gaps are sufficiently small to block flow of a gas on one side of said valve housing up to a predetermined pressure limit, thereby obviating any need for O-rings.
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