Capacitive pressure sensor with reference chamber
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United States of America Patent
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Oct 7, 2008
Grant Date -
Oct 11, 2007
app pub date -
Jun 17, 2007
filing date -
Oct 18, 2004
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A capacitive pressure sensor includes a substrate assembly having a conductive layer. A conductive membrane is mounted to the substrate assembly so that a sealed reference chamber is defined by the conductive membrane and the substrate assembly. A cap is arranged on the substrate assembly and defines one or more apertures so that an antechamber is defined between the cap and the conductive membrane. Differential pressure between the reference chamber and antechamber can cause deflection of the conductive membrane which, in turn, varies the capacitance between the conductive membrane and the conductive layer.
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