Surface cleaning and sterilization
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United States of America Patent
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Oct 7, 2008
Grant Date -
Oct 26, 2006
app pub date -
Mar 17, 2006
filing date -
May 8, 2002
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Methods and apparatus are provided for igniting, modulating, and sustaining a plasma for various plasma processes and treatments. Such treatments include cleaning and sterilizing parts. In some embodiments, a plasma is ignited by subjecting a gas in a multi-mode processing cavity to electromagnetic radiation having a frequency between about 1 MHz and about 333 GHz in the presence of a plasma catalyst. A part can be cleaned by, for example, inserting hydrogen into the plasma and exposing the part to the hydrogen-enriched plasma. A part can be sterilized by heating the part with the plasma.
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