Articulated MEMs structures
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United States of America Patent
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Oct 7, 2008
Grant Date -
Oct 5, 2006
app pub date -
Feb 15, 2006
filing date -
Feb 16, 2005
priority date (Note) -
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Abstract
The present invention relates to an articulated micro-electro-mechanical (MEMS) device, which is constructed in such a way as to enable several of the devices to be closely packed together, i.e. high fill factor, for redirecting specific wavelengths of light from a dispersed optical signal to different output ports. The articulated MEMS device includes multiple pivotally connected sections that are pivotable about two perpendicular axes for limiting the amount of dynamic cross-talk as the device is rotated between different positions.
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