Laser inspection using diffractive elements for enhancement and suppression of surface features
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United States of America Patent
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Oct 7, 2008
Grant Date -
Feb 12, 2004
app pub date -
Aug 8, 2002
filing date -
Aug 8, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Apparatus for optical inspection of a sample includes a radiation source, adapted to irradiate a spot on the sample with coherent radiation, and collection optics, adapted to collect the radiation scattered from the spot so as to form a beam of scattered radiation. A diffractive optical element (DOE) is positioned to intercept the beam of scattered radiation and is adapted to deflect a first portion of the beam by a predetermined offset relative to a second portion of the beam, and then to optically combine the first portion with the second portion to generate a product beam. A detector is positioned to receive the product beam and to generate a signal responsive thereto, which is processed by a signal processor so as to determine an autocorrelation value of the product beam.
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