Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes
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United States of America Patent
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Oct 14, 2008
Grant Date -
Jul 14, 2005
app pub date -
Dec 14, 2004
filing date -
May 7, 2003
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Abstract
Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.
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