Methods of fabricating a membrane with improved mechanical integrity
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United States of America Patent
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Oct 14, 2008
Grant Date -
Aug 22, 2002
app pub date -
Feb 12, 2001
filing date -
Feb 12, 2001
priority date (Note) -
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Abstract
Methods for fabricating robust films across a patterned underlying layer's edges or steps are disclosed. The novel methods diminish the negative effects of electrode steps or edges on the integrity of a membrane. Thus, the methods are particularly applicable to membrane release technology. The height of the step or edge is eliminated or reduced to increase the mechanical integrity of the film.
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