Electrical connections in microelectromechanical devices
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United States of America Patent
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Oct 14, 2008
Grant Date -
Nov 10, 2005
app pub date -
Jul 13, 2005
filing date -
Feb 12, 2003
priority date (Note) -
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Abstract
A micromirror device and a method of making the same are disclosed herein. The micromirror device comprises a mirror plate, hinge, and post each having an electrically conductive layer. One of the hinge, mirror plate, and post further comprises an electrically insulating layer. To enable the electrical connections between the conducting layers of the hinge, mirror plate, and post, the insulating layer is patterned.
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