Wafer level packaging structure with inductors and manufacture method thereof

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United States of America Patent

PATENT NO 7436683
APP PUB NO 20070217174A1
SERIAL NO

11639557

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Abstract

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A wafer level packaging structure with inductors and manufacture method thereof. The method comprises providing a substrate, having several inductors, forming conductive lines and holes to connect the inductors and the wafer, and bonding the substrate and the wafer via bonding pads. Therefore, there are air gaps between the inductors and the wafer, thereby reducing the inductor's dispassion loss and increasing the inductor's quality factor. In addition, the inductors having a high quality factor can be integrated in the wafer containing active/passive components.

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Patent Owner(s)

Patent OwnerAddress
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEHSINCHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Shen, Lee-Cheng Hsinchu, TW 12 80

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