Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
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United States of America Patent
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Oct 28, 2008
Grant Date -
Mar 15, 2007
app pub date -
Aug 17, 2006
filing date -
Apr 24, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention provides a micro-electro-mechanical-system (MEMS) mirror device, comprising: a mirror having a 2-dimensional rotational T-shaped hinge at a first end, and having a flexible connection at a second end opposite the first end. The invention also provides a MEMS mirror device, comprising: a mirror having a 2-dimensional rotational T-shaped hinge at a first end; and a vertical actuator connected to the 2-dimensional T-shaped hinge through a rigid connection. The invention also provides a MEMS mirror device, comprising: a mirror connected to a first end of a rotational actuator through bending springs at a first end, and having a torsional spring at a second end opposite the first end; a movable cantilever connected to the mirror through the torsional spring; and a support structure connected to the first end and a second end of the rotational actuator through torsional springs and connected to the movable cantilever.
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