System and method of providing a regenerating protective coating in a MEMS device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 4, 2008
Grant Date -
Apr 13, 2006
app pub date -
May 20, 2005
filing date -
Sep 27, 2004
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In various embodiments of the invention, a regenerating protective coating is formed on at least one surface of an interior cavity of a MEMS device. Particular embodiments provide a regenerating protective coating on one or more mirror surfaces of an interferometric light modulation device, also known as an iMoD in some embodiments. The protective coating can be regenerated through the addition of heat or energy to the protective coating.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully