Method of producing a surface acoustic wave device

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United States of America Patent

PATENT NO 7448119
APP PUB NO 20070278897A1
SERIAL NO

11805760

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Abstract

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A method of producing a surface acoustic wave device includes a sacrificial-layer forming step of forming a sacrificial layer on a piezoelectric substrate so as to cover comb electrodes and reflectors, a space-forming-member forming step of forming a space-forming member while openings are formed near the reflectors along a surface of the sacrificial layer, a sacrificial-layer removing step of removing the sacrificial layer from the openings of the space-forming member, and a resin sealing step of sealing a surface acoustic wave element with sealing resin, the surface acoustic wave element having an excitation protection space formed between the reflectors and the comb electrodes by the space-forming member.

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Patent Owner(s)

Patent OwnerAddress
QORVO US INC7628 THORNDIKE ROAD GREENSBORO NC 27409

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ozaki, Kyosuke Fukushima-ken, JP 11 96

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