Scanning thermal probe microscope
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United States of America Patent
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Nov 11, 2008
Grant Date -
N/A
app pub date -
Jun 18, 2003
filing date -
Jun 18, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus and method of measuring a parameter associated with a sample is provided. The method includes providing a probe adapted to heat the sample and applying a measuring current having a frequency .omega..sub.1 to the probe. In operation, the method measures the amplitude of the voltage across the probe at a frequency .omega..sub.1. This amplitude is indicative of a temperature of the probe. The preferred embodiment also provides a method of separating contamination of the thermal data caused by the probe from thermal data associated with the sample under test.
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