Method for manufacturing a plate-shaped workpiece
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United States of America Patent
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-
Nov 11, 2008
Grant Date -
Nov 3, 2005
app pub date -
Apr 30, 2004
filing date -
Apr 30, 2004
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A method for producing a disk shaped workpiece with a dielectric substrate includes treatment in a plasma process volume between two electrode faces bounding a high-frequency plasma discharge. One electrode face is of dielectric material and is at a high-frequency potential with a varying distribution along the face. The other electrode face is metallic. Reactive gas is introduced into the process volume through an aperture pattern. The dielectric substrate, before treatment, is at least regionally coated with a layer material to whose specific resistance applies: 10.sup.-5 .OMEGA.cm.ltoreq..ltoreq.10.sup.-1 .OMEGA.cm, and to the resulting surface resistance R.sub.S of the layer applies: 0
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