Method for fabricating a microscale anemometer
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United States of America Patent
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Nov 18, 2008
Grant Date -
Dec 8, 2005
app pub date -
May 18, 2005
filing date -
Jan 18, 2002
priority date (Note) -
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Abstract
Method for fabricating a microscale anemometer on a substrate. A sacrificial layer is formed on the substrate, and a metal thin film is patterned to form a sensing element. At least one support for the sensing element is patterned. The sacrificial layer is removed, and the sensing element is lifted away from the substrate by raising the supports, thus creating a clearance between the sensing element and the substrate to allow fluid flow between the sensing element and the substrate. The supports are raised preferably by use of a magnetic field applied to magnetic material patterned on the supports.
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