Piezoelectric oscillating circuit, method for manufacturing the same and filter arrangement
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United States of America Patent
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Nov 25, 2008
Grant Date -
Mar 24, 2005
app pub date -
Jun 16, 2004
filing date -
Dec 19, 2001
priority date (Note) -
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Abstract
In a method for manufacturing a piezoelectric oscillating circuit in thin film technology, wherein the oscillating circuit includes a predetermined natural frequency and a plurality of layers, first of all at least a first layer of the piezoelectric oscillating circuit is generated. Subsequently, by processing the first layer a frequency correction is performed. Subsequently, at least a second layer of the piezoelectric oscillating circuit is generated and processed for performing a second frequency correction.
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