Wireless substrate-like sensor
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United States of America Patent
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Nov 25, 2008
Grant Date -
Aug 3, 2006
app pub date -
Mar 15, 2006
filing date -
Feb 6, 2002
priority date (Note) -
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Abstract
A wireless substrate-like sensor is provided to facilitate alignment and calibration of semiconductor processing systems. The wireless substrate-like sensor includes an optical image acquisition system that acquires one or more images of targets placed within the semiconductor processing system. Analysis of images of the targets obtained by the wireless substrate-like sensor provides position and/or orientation information in at least three degrees of freedom. An additional target is affixed to a known location within the semiconductor processing system such that imaging the reference position with the wireless substrate-like sensor allows the measurement and compensation for pick-up errors.
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