Protection layers in micromirror array devices

United States of America Patent

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Dec 2, 2008
Grant Date
Sep 22, 2005
app pub date
May 24, 2005
filing date
Feb 12, 2003

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Abstract

To protect the structural layers from being eroded in the etching process, a protection layer is deposited on the exposed structural layers of the micromirror. The protection layer is deposited before etching and removed after etching.

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Patent Owner(s)

TEXAS INSTRUMENTS INCORPORATED;VENTURE LENDING & LEASING IV, INC.

International Classification(s)

H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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[Patents Count]

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Inventor Name	Address	# of filed Patents	Total Citations
Doan, Jonathan	Mountain View, CA	17	240
Heureux, Peter	Felton, CA	7	175
Patel, Satyadev	Palo Alto, CA	43	664

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Protection layers in micromirror array devices

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United States of America Patent

11135699

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PATENT NO	7459402
APP PUB NO	20050206993A1
SERIAL NO	11135699
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
December 02, 2008	US,7459402,B2 US7459402B2	GRANTED PATENT AS SECOND PUBLICATION
September 22, 2005	US,20050206993,A1 US20050206993A1	FIRST PUBLISHED PATENT APPLICATION

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11135699

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