Separable modulator
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Dec 2, 2008
Grant Date -
Mar 18, 2004
app pub date -
Aug 19, 2003
filing date -
May 5, 1994
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts.
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