Quartz crystal microbalance humidity sensor
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United States of America Patent
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Dec 9, 2008
Grant Date -
Nov 23, 2006
app pub date -
May 17, 2004
filing date -
May 22, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A humidity sensor and a quartz crystal microbalance (QCM) therefor, for measuring low humidity levels, and a method for preparing same. The metallic surface of the QCM is electroplated with a hygroscopic layer. The hygroscopic layer preferably includes Manganese. A salt is formed on the hygroscopic layer. The salt is preferably salt of Manganese, and most preferably Manganese Chloride (MnCl2).
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