US Patent No: 7,461,553
Number of patents in Portfolio can not be more than 2000
Self-calibrating oversampling electromechanical modulator and self-calibration method
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Dec 9, 2008
Issued date -
Dec 5, 2006
filing date -
11/567,159
serial no -
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Abstract
An oversampling electromechanical modulator, including a micro-electromechanical sensor which has a first sensing capacitance and a second sensing capacitance and supplies an analog quantity correlated to the first sensing capacitance and to the second sensing capacitance; a converter stage, which supplies a first numeric signal and a second numeric signal that are correlated to the analog quantity; and a first feedback control circuit for controlling the micro-electromechanical sensor, which supplies an electrical actuation quantity correlated to the second numeric signal. The electromechanical modulator moreover includes a second feedback control circuit for calibrating the micro-electromechanical sensor, which includes an offset-sensing circuit that can be activated by the first numeric signal, and a programmable calibration circuit, having a programmable calibration capacitance, which is connected to the micro-electromechanical sensor and is controlled by the offset-sensing circuit for balancing of the first sensing capacitance and second sensing capacitance.
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First Claim
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
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| 6,856,144 Method and circuit for detecting movements through micro-electric-mechanical sensors, compensating parasitic capacitances and spurious movements | 4 | 2002 | |
| 6,753,691 Method and circuit for detecting displacements using micro-electromechanical sensors with compensation of parasitic capacitances and spurious displacements | 4 | 2002 | |
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| 6,674,217 VIBRATION MEMBER USING ELECTRO-MECHANICAL ENERGY CONVERSION ELEMENT AS DRIVING SOURCE, VIBRATION WAVE DRIVING APPARATUS USING VIBRATION MEMBER AS DRIVING SOURCE AND APPARATUS PROVIDED WITH VIBRATION WAVE DRIVING APPARATUS | 6 | 2000 | |
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| 6,127,811 Micro-electromechanical system and voltage shifter, method of synchronizing an electronic system and a micromechanical system of a micro-electromechanical system | 33 | 1999 | |
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| 5,481,905 Transducer circuit having negative integral feedback | 11 | 1992 | |
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| 2005/0066,704 Method and device for the electrical zero balancing for a micromechanical component | 3 | 2004 | |
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| 5,960,375 Transmitter with improved compensation | 16 | 1997 | |
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| 6,862,938 Differential capacitive type MEMS sensor apparatus with capacitance compensator having MEMS structure | 3 | 2004 | |
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| 6,798,321 Micro electromechanical switches | 8 | 2002 | |
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| 6,621,279 Drive feedthrough nulling system | 8 | 2002 | |
Patent Citation Ranking
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jun 9, 2016 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jun 9, 2020 |
| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |