Method of fabricating inkjet nozzle chambers having filter structures
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United States of America Patent
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Dec 16, 2008
Grant Date -
Apr 12, 2007
app pub date -
Oct 11, 2005
filing date -
Oct 11, 2005
priority date (Note) -
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status (Latency Note)
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Abstract
A method of fabricating a plurality of inkjet nozzles on a substrate. The method comprises the steps of: (a) providing a substrate having a plurality of trenches corresponding to ink inlets; (b) depositing sacrificial material so as fill the trenches and form a scaffold on the substrate; (c) defining openings in the sacrificial material; (d) depositing roof material over the sacrificial material to form nozzle chambers and filter structures simultaneously; (e) etching nozzle apertures through the roof material; and (f) removing the sacrificial material.
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