Method of pressure sensing with a pressure sensor having a sensor membrane and a compensation membrane
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United States of America Patent
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Dec 16, 2008
Grant Date -
Jul 24, 2008
app pub date -
Mar 27, 2008
filing date -
Oct 18, 2004
priority date (Note) -
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Abstract
The invention provides for a method of sensing pressure with a pressure sensor having a sensor membrane and a compensation membrane. The pressure sensor also includes a power supply, a controller; and a charge amplifier, a charge injector and two switches arranged in signal communication with the controller. The method includes the step of connecting the charge amplifier to the switches via a sensor capacitor C.sub.s in parallel with a reference capacitor C.sub.r in parallel with a parasitic capacitance C.sub.p to ground, the charge injector and charge amplifier arranged in parallel connection between the capacitors and the controller. The method also includes the step of operating the switches, via the controller, to determine a charge imbalance indicative of a pressure difference between the sensor and compensation membranes.
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