Bimorph switch, bimorph switch manufacturing method, electronic circuitry and electronic circuitry manufacturing method
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United States of America Patent
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-
Dec 16, 2008
Grant Date -
Dec 7, 2006
app pub date -
Aug 15, 2006
filing date -
Jul 22, 2002
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A bimorph switch electrically connecting a traveling contact and a fixed contact. The switch comprises a substrate having a front face, a rear face, and a through hole penetrating from the front face to the rear face; a fixed contact extending from an edge portion of the aperture of the through hole towards the inside of the aperture; and a bimorph section holding the traveling contact at a position facing the aperture and driving the traveling contact. One end of the bimorph section may be formed on a silicon oxide layer formed on a front face of the substrate.
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