Detector system of secondary and backscattered electrons for a scanning electron microscope
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Dec 30, 2008
Grant Date -
Nov 9, 2006
app pub date -
Apr 14, 2006
filing date -
Oct 14, 2003
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A system for detecting secondary and backscattered electrons in a scanning electron microscope includes a microporous plate (9) that is disposed between a lower scintillator (5) and an upper scintillator (12). The lower scintillator (5) faces toward a specimen stage (11). A movable diaphragm (14) having an aperture (15) is located between the front end of a photomultiplier (7) and the respective ends of an upper light guide (13) and lower light guide (6). Inside an intermediate chamber (3), at least one focusing electrode (8) is placed, with its hole positioned coaxially with the hole in the microporous plate (9). The focusing electrode (8) is located on the surface of the lower scintillator (5).
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully