Process of forming a micromechanical system containing an anti-stiction gas-phase lubricant
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United States of America Patent
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Dec 30, 2008
Grant Date -
May 24, 2007
app pub date -
Dec 22, 2005
filing date -
Nov 23, 2005
priority date (Note) -
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Abstract
Embodiments of the present invention generally relate to a process of forming a device that has an improved usable lifetime due to the addition of a gas-phase lubricant that reduces the likelihood of stiction occurring between the various moving parts in an electromechanical device. One advantage of the disclosed device is that a gas-phase lubricant has a high diffusion rate and, therefore, is self-replenishing, meaning that it can quickly move back into a contact region after being physically displaced from the region by the contacting surfaces of the device during operation. Consequently, the gas-phase lubricant is more reliable than conventional solid or liquid lubricants in preventing stiction-related device failures.
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