Adhesive particle shielding
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United States of America Patent
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Jan 6, 2009
Grant Date -
Mar 18, 2004
app pub date -
Sep 17, 2002
filing date -
Sep 17, 2002
priority date (Note) -
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status (Latency Note)
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Abstract
An efficient device for capturing fast moving particles has an adhesive particle shield that includes (i) a mounting panel and (ii) a film that is attached to the mounting panel wherein the outer surface of the film has an adhesive coating disposed thereon to capture particles contacting the outer surface. The shield can be employed to maintain a substantially particle free environment such as in photolithographic systems having critical surfaces, such as wafers, masks, and optics and in the tools used to make these components, that are sensitive to particle contamination. The shield can be portable to be positioned in hard-to-reach areas of a photolithography machine. The adhesive particle shield can incorporate cooling means to attract particles via the thermophoresis effect.
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