Electrolytic processing apparatus and electrolytic processing method
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United States of America Patent
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Jan 13, 2009
Grant Date -
Feb 17, 2005
app pub date -
Aug 10, 2004
filing date -
Aug 11, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
There are provided an electrolytic processing apparatus and an electrolytic processing method which can regenerate an ion exchanger with an enhanced regeneration rate of ion-exchange capacity without adversely affecting the throughput of the apparatus. The electrolytic processing apparatus includes: a holder for holding a workpiece; an electrode section including an electrode, a contact member, and a discharge portion for discharging metal ions which have been taken from the workpiece into the contact member during processing, said electrode section coming close to or into contact with the workpiece held by the holder to effect processing of the workpiece in the presence of a liquid; and a regeneration dummy electrode which can come close to or into contact with the contact member.
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